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KOUTNÁ, N. ŘEHÁK, P. CHEN, Z. BARTOSIK, M. FALLMANN, M. ČERNÝ, M. ZHANG, Z. FRIÁK, M. ŠOB, M. MAYRHOFER, P.H. HOLEC, D.
Original Title
Correlating structural and mechanical properties of AlN/TiN superlattice films
Type
journal article in Web of Science
Language
English
Original Abstract
Combining first-principles and experimental techniques, we establish Young’s modulus dependence of AlN/TiN superlattices on the film-forming phases, their thicknesses and crystallographic orientations. The disparate character of cleavage properties within different layers of the superlattice— providing indications regarding crack initiation processes—is linked to the changes in bond lengths. Such changes present a direct consequence of the predicted interplanar spacing oscillations which are experimentally confirmed by high resolution transmission electron microscopy analyses.
Keywords
transition metal nitrides; superlattices; microstructural design; elastic moduli; cleavage energy
Authors
KOUTNÁ, N.; ŘEHÁK, P.; CHEN, Z.; BARTOSIK, M.; FALLMANN, M.; ČERNÝ, M.; ZHANG, Z.; FRIÁK, M.; ŠOB, M.; MAYRHOFER, P.H.; HOLEC, D.
Released
1. 5. 2019
ISBN
1359-6462
Periodical
SCRIPTA MATERIALIA
Year of study
165
Number
3
State
United States of America
Pages from
159
Pages to
163
Pages count
5
BibTex
@article{BUT155625, author="KOUTNÁ, N. and ŘEHÁK, P. and CHEN, Z. and BARTOSIK, M. and FALLMANN, M. and ČERNÝ, M. and ZHANG, Z. and FRIÁK, M. and ŠOB, M. and MAYRHOFER, P.H. and HOLEC, D.", title="Correlating structural and mechanical properties of AlN/TiN superlattice films", journal="SCRIPTA MATERIALIA", year="2019", volume="165", number="3", pages="159--163", doi="10.1016/j.scriptamat.2019.02.021", issn="1359-6462" }