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MARTINEK, J. VALTR, M. GROLICH, P. HORTVÍK, V. DANICK, B. SHAKER, M. KLAPETEK, P.
Original Title
Large area scanning thermal microscopy and infrared imaging system
Type
journal article in Web of Science
Language
English
Original Abstract
This paper describes two calibrated methods to determine the temperature map of micro- and nano- devices.
Keywords
scanning thermal microscopy; large area SPM; finite element method
Authors
MARTINEK, J.; VALTR, M.; GROLICH, P.; HORTVÍK, V.; DANICK, B.; SHAKER, M.; KLAPETEK, P.
Released
14. 2. 2019
ISBN
1361-6501
Periodical
Measurement Science and Technology
Number
30
State
United Kingdom of Great Britain and Northern Ireland
Pages from
1
Pages to
12
Pages count
URL
https://iopscience.iop.org/article/10.1088/1361-6501/aafa96
BibTex
@article{BUT156323, author="Jan {Martinek} and Miroslav {Valtr} and Petr {Grolich} and Václav {Hortvík} and Briand {danick} and Marjan {Shaker} and Petr {Klapetek}", title="Large area scanning thermal microscopy and infrared imaging system", journal="Measurement Science and Technology", year="2019", number="30", pages="1--12", doi="10.1088/1361-6501/aafa96", issn="1361-6501", url="https://iopscience.iop.org/article/10.1088/1361-6501/aafa96" }