Publication detail

Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

TINOCO NAVARRO, H. HOLZER, J. PIKÁLEK, T. BUCHTA, Z. LAZAR, J. CHLUPOVÁ, A. KRUML, T. HUTAŘ, P.

Original Title

Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests

Type

journal article in Web of Science

Language

English

Original Abstract

This paper describes and applies a methodology to determine the elastic properties of freestanding thin membranes by means of a bulge test and a numerical approach. The numerical procedure is based on the combination of two standard methods i.e. finite element analysis and classical analytical solutions to calculate elastic properties of thin films. Bulge tests were conducted on silicon nitride (Si3N4) monolayer of 2 x 2 mm (square) and 3.5 x 1.5mm (rectangular) membranes with the aim to determine elastics properties (Young's modulus (E) and Poison's ratio (v)) that define the load-deflection curves of both membranes. With this purpose, an error function was constructed for each membrane which involved finite element solutions, analytical solutions and experimental measurements. Error functions were found and minimized by mapping a set of elastic parameters for the two membranes (square and rectangular). A unique solution was determined in the intersection of both linear approximations, obtaining 236 GPa for E and 0.264 for v. It is well known that in a traditional bulge test analysis only one of both biaxial modulus can be determined and not a combination of E and v. Numerical results show that calculated load-deflection curves agree well with the measurements obtained for both square and rectangular membranes experimentally. The proposed methodology is only applicable in thin films with elastic behavior, however generalization for more complicated geometries is possible.

Keywords

Elastic properties; Bulge test; Thin film; Finite element analysis; Silicon nitride

Authors

TINOCO NAVARRO, H.; HOLZER, J.; PIKÁLEK, T.; BUCHTA, Z.; LAZAR, J.; CHLUPOVÁ, A.; KRUML, T.; HUTAŘ, P.

Released

15. 2. 2019

Publisher

ELSEVIER SCIENCE SA

Location

LAUSANNE

ISBN

0040-6090

Periodical

Thin Solid Films

Year of study

672

Number

1

State

Kingdom of the Netherlands

Pages from

66

Pages to

74

Pages count

9

URL

https://www.sciencedirect.com/science/article/pii/S0040609018308484

BibTex

@article{BUT162252,
  author="Hector Andres {Tinoco Navarro} and Jakub {Holzer} and Tomáš {Pikálek} and Zdeněk {Buchta} and Josef {Lazar} and Alice {Chlupová} and Tomáš {Kruml} and Pavel {Hutař}",
  title="Determination of elastic parameters of Si3N4 thin films by means of a numerical approach and bulge tests",
  journal="Thin Solid Films",
  year="2019",
  volume="672",
  number="1",
  pages="66--74",
  doi="10.1016/j.tsf.2018.12.039",
  issn="0040-6090",
  url="https://www.sciencedirect.com/science/article/pii/S0040609018308484"
}