Publication detail

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

KONVALINA, I. MIKA, F. KRÁTKÝ, S. MATERNA MIKMEKOVÁ, E. MÜLLEROVÁ, I.

Original Title

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

Type

journal article in Web of Science

Language

English

Original Abstract

Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible.

Keywords

band-pass filter of signal electrons, SE detection, trajectory simulations

Authors

KONVALINA, I.; MIKA, F.; KRÁTKÝ, S.; MATERNA MIKMEKOVÁ, E.; MÜLLEROVÁ, I.

Released

19. 7. 2019

ISBN

1996-1944

Periodical

Materials

Year of study

12

Number

14

State

Swiss Confederation

Pages count

13

BibTex

@article{BUT165284,
  author="Ivo {Konvalina} and Filip {Mika} and Stanislav {Krátký} and Eliška {Materna Mikmeková} and Ilona {Müllerová}",
  title="In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM",
  journal="Materials",
  year="2019",
  volume="12",
  number="14",
  pages="13",
  issn="1996-1944"
}