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PRŮŠA, S. BÁBÍK, P. ŠIKOLA, T. BRONGERSMA, H.
Original Title
Quantitative analysis of calcium and fluorine by high-sensitivity low-energy ion scattering: Calcium fluoride
Type
journal article in Web of Science
Language
English
Original Abstract
Low-energy ion scattering (LEIS) probes the atomic composition of the outer surface. Well-defined reference samples are used for the quantitation. For elements like fluorine and calcium, it is not easy to find suitable, clean, and homogeneous references, since fluorine is a gas and calcium is a very reactive metal. In contrast to surface analytic techniques such as XPS, the extreme surface sensitivity of LEIS makes it difficult to use stable compounds like CaF(2)as reference, since these compounds are not homogeneous at the atomic scale. With LEIS, CaF(2)is not expected to show an atomic ratio F/Ca = 2.0. Thus, before CaF(2)can be used as reference, its atomic surface concentrations have to be determined. Here, 3-keV He(+)scattering by a LiF(001) single crystal, an evaporated layer of Ca, and a Cu foil are used as basic references. High-purity CaF(2)is available in two forms: a single crystal and a powder. For a practical reference, powders are preferred, since if bulk impurities segregate to the surface, they will be dispersed over a large surface area. It is found that both CaF2(111) and powder have similar F/Ca atomic ratios. This confirms the F termination for both samples. For the powder, the F and Ca signals are reduced by 0.77 +/- 0.03 in comparison with those for the single crystal. The atomic sensitivity factors and relative sensitivity factors have been determined for F, Ca, and Cu.
Keywords
Ca; calcium fluoride; Cu; LEIS; LiF(001); surface termination
Authors
PRŮŠA, S.; BÁBÍK, P.; ŠIKOLA, T.; BRONGERSMA, H.
Released
4. 9. 2020
Publisher
WILEY
Location
HOBOKEN
ISBN
0142-2421
Periodical
Surface and Interface Analysis
Year of study
52
Number
1
State
United Kingdom of Great Britain and Northern Ireland
Pages from
1000
Pages to
1003
Pages count
4
URL
https://doi.org/10.1002/sia.6889
BibTex
@article{BUT166049, author="Stanislav {Průša} and Pavel {Bábík} and Tomáš {Šikola} and Hidde H. {Brongersma}", title="Quantitative analysis of calcium and fluorine by high-sensitivity low-energy ion scattering: Calcium fluoride", journal="Surface and Interface Analysis", year="2020", volume="52", number="1", pages="1000--1003", doi="10.1002/sia.6889", issn="0142-2421", url="https://doi.org/10.1002/sia.6889" }