Publication detail

Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films

OHLÍDAL, I. VOHÁNKA, J. BURŠÍKOVÁ, V. ŠULC, V. ŠUSTEK, Š. OHLÍDAL, M.

Original Title

Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films

Type

journal article in Web of Science

Language

English

Original Abstract

The method of variable angle spectroscopic ellipsometry usable for the complete optical characterization of inhomogeneous thin films exhibiting complicated thickness non-uniformity together with transition layers at their lower boundaries is presented in this paper. The inhomogeneity of these films is described by means of the multiple-beam interference model. The thickness non-uniformity is taken into account by averaging the elements of the Mueller matrix along the area of the light spot of the ellipsometer on the films. The local thicknesses are expressed using polynomials in the coordinates along the surfaces of the films. The efficiency of the method is illustrated by means of the optical characterization of a selected sample of the polymer-like thin film of SiOxCyHz, prepared by plasma enhanced chemical vapor deposition onto the silicon single crystal substrate. The Campi-Coriasso dispersion model is used to determine the spectral dependencies of the optical constants at the upper and lower boundaries of this film. The profiles of these optical constants are determined too. The thickness non-uniformity is described using a model with local thicknesses given by the polynomial with at most quadratic terms. In this way it is possible to determine the geometry of the upper boundary. The thickness and spectral dependencies of the optical constants of the transition layer are determined as well. Imaging spectroscopic reflectometry is utilized for confirming the results concerning the thickness non-uniformity obtained using ellipsometry. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

Keywords

Ellipsometry, inhomogeneous thin films, nonuniformity in thickness, thickness non-uniformity, inhomogeneous polymer-like thin films.

Authors

OHLÍDAL, I.; VOHÁNKA, J.; BURŠÍKOVÁ, V.; ŠULC, V.; ŠUSTEK, Š.; OHLÍDAL, M.

Released

23. 11. 2020

Publisher

Optical Society of America

Location

WASHINGTON

ISBN

1094-4087

Periodical

OPTICS EXPRESS

Year of study

28

Number

24

State

United States of America

Pages from

36796

Pages to

36811

Pages count

16

URL

https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-28-24-36796&id=442763

Full text in the Digital Library

http://hdl.handle.net/11012/196569

BibTex

@article{BUT167467,
  author="Ivan {Ohlídal} and Jíří {Vohánka} and Vilma {Buršíková} and Václav {Šulc} and Štěpán {Šustek} and Miloslav {Ohlídal}",
  title="Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films",
  journal="OPTICS EXPRESS",
  year="2020",
  volume="28",
  number="24",
  pages="36796--36811",
  doi="10.1364/OE.412043",
  issn="1094-4087",
  url="https://www.osapublishing.org/oe/fulltext.cfm?uri=oe-28-24-36796&id=442763"
}