Publication detail

Bringing real-time traceability to high-speed atomic force microscopy

HEAPS, E YACOOT, A. DONGMO, H. PICCO, l. PAYTON, O.D. RUSSEL-PAVIER, F. KLAPETEK, P.

Original Title

Bringing real-time traceability to high-speed atomic force microscopy

Type

journal article in Web of Science

Language

English

Original Abstract

In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short-range video rate images and large-area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.

Keywords

metrology; high-speed atomic force microscopy; traceability; nanometrology; nanotechnology

Authors

HEAPS, E; YACOOT, A.; DONGMO, H.; PICCO, l.; PAYTON, O.D.; RUSSEL-PAVIER, F.; KLAPETEK, P.

Released

1. 7. 2020

Publisher

IOP PUBLISHING LTD

Location

BRISTOL

ISBN

1361-6501

Periodical

Measurement Science and Technology

Year of study

31

Number

7

State

United Kingdom of Great Britain and Northern Ireland

Pages from

1

Pages to

11

Pages count

11

URL

https://doi.org/10.1088/1361-6501/ab7ca9

BibTex

@article{BUT167802,
  author="HEAPS, E and YACOOT, A. and DONGMO, H. and PICCO, l. and PAYTON, O.D. and RUSSEL-PAVIER, F. and KLAPETEK, P.",
  title="Bringing real-time traceability to high-speed atomic force microscopy",
  journal="Measurement Science and Technology",
  year="2020",
  volume="31",
  number="7",
  pages="1--11",
  doi="10.1088/1361-6501/ab7ca9",
  issn="1361-6501",
  url="https://doi.org/10.1088/1361-6501/ab7ca9"
}