Publication detail

Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases

VALLEJOS VARGAS, S. HUBÁLEK, J.

Original Title

Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases

Type

conference paper

Language

English

Original Abstract

ZnO rods were grown via aerosol-assisted chemical vapor deposition on Si-based micromachined platforms. The photo- and thermo-activated sensor characteristics were evaluated towards carbon monoxide, ethanol and toluene. Results proved photo-activated response at room temperature with improved response and selectivity compared to the thermo-activated response at 250 °C. This property becomes significantly advantageous as it allows for the sensor to operate without heating.

Keywords

ZnO, rods, AACVD, gas sensing, photo-activation

Authors

VALLEJOS VARGAS, S.; HUBÁLEK, J.

Released

7. 2. 2017

Publisher

Institute of Electrical and Electronics Engineers Inc

ISBN

978-1-5090-5072-7

Book

2017 Spanish Conference on Electron Devices, CDE 2017

Pages from

1

Pages to

4

Pages count

4

URL

http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7905206

BibTex

@inproceedings{BUT170141,
  author="Stella {Vallejos Vargas} and Jaromír {Hubálek}",
  title="Micromachined sensors based on ZnO structures and their thermo- and photo-activated response to reducing gases",
  booktitle="2017 Spanish Conference on Electron Devices, CDE 2017",
  year="2017",
  pages="1--4",
  publisher="Institute of Electrical and Electronics Engineers Inc",
  doi="10.1109/CDE.2017.7905206",
  isbn="978-1-5090-5072-7",
  url="http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7905206"
}