Publication detail

FIR Filter for Feed-Forward Compensation of MEMS Actuator

KOLKA, Z. BIOLKOVÁ, V. BIOLEK, D. BARCÍK, P.

Original Title

FIR Filter for Feed-Forward Compensation of MEMS Actuator

Type

conference paper

Language

English

Original Abstract

The paper describes a compensation filter design for the electrostatic MEMS actuator, which is used to move a mirror for beam spot stabilization in a Free-Space Optical receiver. The actuator represents a dynamical system of the second-order with a highly oscillating response. The purpose of the filter is to prevent excitation of MEMS oscillations. The paper describes a simple three-tap FIR filter whose parameters have a direct relation to the actuator model and allow simple in-application tuning during the device operation.

Keywords

MEMS, dynamical system, compensation, FIR, continuous time, discrete time

Authors

KOLKA, Z.; BIOLKOVÁ, V.; BIOLEK, D.; BARCÍK, P.

Released

13. 10. 2021

Publisher

IEEE

Location

Liptovský Mikuláš, Slovakia

ISBN

978-1-6654-2880-4

Book

2021 Communication and Information Technologies Conference Proceedings

Pages from

1

Pages to

4

Pages count

4

URL

https://ieeexplore.ieee.org/document/9583761

BibTex

@inproceedings{BUT175543,
  author="Zdeněk {Kolka} and Viera {Biolková} and Dalibor {Biolek} and Peter {Barcík}",
  title="FIR Filter for Feed-Forward Compensation of MEMS Actuator",
  booktitle="2021 Communication and Information Technologies Conference Proceedings",
  year="2021",
  pages="1--4",
  publisher="IEEE",
  address="Liptovský Mikuláš, Slovakia",
  doi="10.1109/KIT52904.2021.9583761",
  isbn="978-1-6654-2880-4",
  url="https://ieeexplore.ieee.org/document/9583761"
}