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MAXA, J. ŠABACKÁ, P. VYROUBAL, P.
Original Title
Analysis of impact of conic aperture in differentially pumped chamber
Type
journal article in Scopus
Language
English
Original Abstract
The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.
Keywords
ANSYS Fluent; Differentially pumped chamber; Environmental scanning electron microscope (ESEM); Finite volume method; Taylor-Maccoll theory
Authors
MAXA, J.; ŠABACKÁ, P.; VYROUBAL, P.
Released
1. 1. 2019
Publisher
University of Defence
Location
Brno
ISBN
1802-2308
Periodical
Advances in Military Technology
Year of study
14
Number
1
State
Czech Republic
Pages from
151
Pages to
161
Pages count
11
URL
https://www.unob.cz/fvt/vyzkum_vyvoj/Stranky/aimt/aimt.aspx
BibTex
@article{BUT177389, author="Jiří {Maxa} and Pavla {Šabacká} and Petr {Vyroubal}", title="Analysis of impact of conic aperture in differentially pumped chamber", journal="Advances in Military Technology", year="2019", volume="14", number="1", pages="151--161", doi="10.3849/aimt.01268", issn="1802-2308", url="https://www.unob.cz/fvt/vyzkum_vyvoj/Stranky/aimt/aimt.aspx" }