Publication detail

Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range

ŘEŘUCHA, Š. HOLÁ, M. ŠARBORT, M. OULEHLA, J. MIKEL, B. LAZAR, J. ČÍP, O.

Original Title

Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range

Type

conference paper

Language

English

Original Abstract

We report on the design and prototype realization of the gauge probe sensor for the measurement of displacement based on a laser interferometer. The measurement system incorporates a suitable laser source and interferometric phase processing system. The phase extraction ( fringe counting) relies on a single-detector homodyne detection method for phase extraction that uses a harmonic optical frequency modulation of the laser beam and allows for a significantly reduced and thus compact and robust optical arrangement. The experimental verification revealed that the sensor system achieves the sub-nanometer precision and nanometer accuracy in the 10 mm measurement range.

Authors

ŘEŘUCHA, Š.; HOLÁ, M.; ŠARBORT, M.; OULEHLA, J.; MIKEL, B.; LAZAR, J.; ČÍP, O.

Released

16. 12. 2016

ISBN

1930-0395

Book

2016 IEEE SENSORS

BibTex

@inproceedings{BUT177919,
  author="Šimon {Řeřucha} and Miroslava {Holá} and Martin {Šarbort} and Jindřich {Oulehla} and Břetislav {Mikel} and Josef {Lazar} and Ondřej {Číp}",
  title="Compact interferometric displacement gauge with sub-nanometer resolution and milimeter range
",
  booktitle="2016 IEEE SENSORS",
  year="2016",
  isbn="1930-0395"
}