Publication detail

NANOPOSITIONING WITH DETECTION OF A STANDING WAVE

HOLÁ, M. HRABINA, J. ČÍP, O. FEJFAR, A. STUCHLÍK, J. KOČKA, J. OULEHLA, J. LAZAR, J.

Original Title

NANOPOSITIONING WITH DETECTION OF A STANDING WAVE

Type

journal article in Web of Science

Language

English

Original Abstract

A measuring technique is intended for displacement and position sensing over a limited range with detection of standing-wave pattern inside of a passive Fabry-Perot cavity. In this concept we consider locking of the laser optical frequency and the length of the Fabry-Perot cavity in resonance. Fixing the length of the cavity to e.g. a highly stable mechanical reference allows stabilizing wavelength of the laser in air and thus to eliminate especially the faster fluctuations of refractive index of air due to air flow and inhomogeneity. Detection of the interference maxima and minima within the Fabry-Perot cavity along the beam axis has been tested and proven with a low loss transparent photodetector with very low reflectivity. The transparent photodetector is based on a thin polycrystalline silicon layer. Reduction of losses was achieved thanks to a design as an optimized set of interference layers acting as an antireflection coating. The principle is demonstrated on an experimental setup.

Keywords

nanometrology, nanopositioning, Fabry-Perot cavity, standing wave, interferometry

Authors

HOLÁ, M.; HRABINA, J.; ČÍP, O.; FEJFAR, A.; STUCHLÍK, J.; KOČKA, J.; OULEHLA, J.; LAZAR, J.

Released

1. 1. 2014

BibTex

@article{BUT177981,
  author="Miroslava {Holá} and Jan {Hrabina} and Ondřej {Číp} and Antonín {Fejfar} and Jiří {Stuchlík} and Jan {Kočka} and Jindřich {Oulehla} and Josef {Lazar}",
  title="NANOPOSITIONING WITH DETECTION OF A STANDING WAVE",
  year="2014"
}