Publication detail

Industrial interferometry systems for multi-axis measurement

OULEHLA, J. HOLÁ, M. HRABINA, J. LAZAR, J. ČÍP, O. VYCHODIL, M. SEDLÁŘ, P. PROVAZNÍK, M.

Original Title

Industrial interferometry systems for multi-axis measurement

Type

conference paper

Language

English

Original Abstract

We report on the results of the common collaborative project of applied research where the Institute of Scfientific Instruments (IS I) of the Academy of Sciences of the Czech Republic and a company Meopta - optika joined their effort in development of high-precision interferometric systems for dimensional metrology and nanometrology. This research exploits previous results in the field of laser standards of optical frequencies and the methodology of interferometric metrology of length together with detection systems of interference signals and their processing at the ISI and the production technology of precise optical components at Meopta optika Within this project we developed a compact, solid-state frequency stabilized laser referenced to iodine transitions and technology of iodine cells for laser frequency stabilization. A fundamental setup of the laser interferometer has been arranged and tested. The company Meopta optika contributes with development of new technology for processing and polishing of high-precision flat-surface optical components.

Keywords

Interferometry, highly-coherent lasers, signal processing

Authors

OULEHLA, J.; HOLÁ, M.; HRABINA, J.; LAZAR, J.; ČÍP, O.; VYCHODIL, M.; SEDLÁŘ, P.; PROVAZNÍK, M.

Released

13. 8. 2015

Location

Munich, Germany

BibTex

@inproceedings{BUT177982,
  author="Jindřich {Oulehla} and Miroslava {Holá} and Jan {Hrabina} and Josef {Lazar} and Ondřej {Číp} and Miloslav {Vychodil} and Petr {Sedlář} and Milan {Provazník}",
  title="Industrial interferometry systems for multi-axis measurement
",
  year="2015",
  address="Munich, Germany",
  doi="10.1117/12.2190747"
}