Publication detail

2D calculation of parasitic fields in misaligned multipole electron-optical systems

BADIN, V. HORÁK, M. LENCOVÁ, B. ZLÁMAL, J.

Original Title

2D calculation of parasitic fields in misaligned multipole electron-optical systems

Type

journal article in Web of Science

Language

English

Original Abstract

The effects of geometrical imperfections in electron-optical components are usually evaluated in 3D simulations. These calculations inherently take a long time, require a large amount of memory, and do not directly produce the necessary axial field functions. We present a 2D perturbation method to calculate parasitic fields in misaligned multipole systems. Our method is based on finding an equivalent potential perturbation, similarly to Sturrock's method, but does not rely on the potential being differentiable. The method is directly applicable to both electrostatic and non-saturated magnetic problems. It does not require any 3D data and it is fully compatible with existing finite element method codes such as EOD. The proposed method produces axial field functions with an accuracy of units to a few tens of percents, depending on the number of unperturbed multipole field components used and the geometry. The results can then be used, for instance, to determine the parasitic imaging aberrations of the misaligned optical system using standard methods, in order to evaluate the effect of mechanical design tolerances.

Keywords

Parasitic aberrations; Electrode misalignment; Perturbation theory; Sturrock's principle; Charged particle optics; Electrostatic deflector

Authors

BADIN, V.; HORÁK, M.; LENCOVÁ, B.; ZLÁMAL, J.

Released

1. 8. 2023

Publisher

ELSEVIER

Location

AMSTERDAM

ISBN

0304-3991

Periodical

Ultramicroscopy

Year of study

253

Number

November 2023

State

Kingdom of the Netherlands

Pages from

1

Pages to

8

Pages count

8

URL

https://doi.org/10.1016/j.ultramic.2023.113825

BibTex

@article{BUT184744,
  author="Viktor {Badin} and Michal {Horák} and Bohumila {Lencová} and Jakub {Zlámal}",
  title="2D calculation of parasitic fields in misaligned multipole electron-optical systems",
  journal="Ultramicroscopy",
  year="2023",
  volume="253",
  number="November 2023",
  pages="1--8",
  doi="10.1016/j.ultramic.2023.113825",
  issn="0304-3991",
  url="https://doi.org/10.1016/j.ultramic.2023.113825"
}