Miniaturní elektrodový systém pro generování ozónu.

Miniature electrode system for ozone generation.

conference paper

Czech

A simple surface discharge ozonizer was designed and tested. Dielectric layer was electronic grade enamel with thickness of 0,5 mm. Thin molybdenum surface electrodes were made by means of magnetron sputtering. In this arrangement discharge ignition voltage of 950 V was measured. Intended use of this device is generation of small amount of ozone from the atmospheric air mainly for testing of the ozone gas sensors. When working gas is dry air attainable concentration is limited to about 9g/m3. This limitation is consequence of ozone catalytic decomposition caused by nitrogen oxides which origin in areas with large power density near the surface electrodes. This phenomenon cannot be suppressed because it is consistent with the principle of surface discharge. Nevertheless the ozone concentration 9g/m3 is sufficient for many applications and is a few orders higher than the sensitivity of ozone gas sensors. Because of low power density in surface discharge the working frequency must be higher than 10 kHz. Switching power loss can be minimized using the resonant converter topology.

Surface discharge ozonizer, gas sensors, resonant converter topology

J.Boušek

2005

13. 12. 2005

Nakl. Novotný

Brno

80-214-3116-4

Mikrosyn. Nové trendy v mikroelektronických systémech a nanotechnologiích. Sborník seminare. Brno 12.12.2005

121

126

6