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KONVALINA, I., MÜLLEROVÁ, I.
Original Title
Collection Efficiency of the Detector of Secondary Electrons in SEM.
Type
conference paper
Language
English
Original Abstract
In order to collect the secondary electrons (SE), scanning electron microscopes (SEM) are equipped with the Everhart-Thornley (ET) type detector. The electrostatic field of the front grid, biased to a positive potential of several hundred volts , is to attract all SE of kinetic energy below 50 eV or at least those from the SE spectrum peak at 1¸3 eV. However, the detection quantum efficiency (DQE) of such detectors has been found to be significantly lower than one, which is mainly given by their low collection efficiency. The electrostatic field of the grid cannot sufficiently penetrate toward the specimen and influence the trajectories of SE owing to grounded electrodes surrounding the specimen (specimen alone and its holder, specimen stage, pole piece of the objective lens, etc).
Keywords
collection efficiency, ET detector, secondary electrons
Authors
Released
12. 7. 2004
Location
Brno
ISBN
80-239-3246-2
Book
Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
Pages from
41
Pages to
42
Pages count
2
BibTex
@inproceedings{BUT21740, author="Ivo {Konvalina} and Ilona {Müllerová}", title="Collection Efficiency of the Detector of Secondary Electrons in SEM.", booktitle="Recent Trends in Charged Particle Optics and Surface Physics Instrumentation", year="2004", pages="2", address="Brno", isbn="80-239-3246-2" }