Sensors Application of Porous Alumina in Thin Film Technology

conference paper

English

Large-scale arrays of ordered nanoparticles on surface, such as semiconductor, metal or polymer nanostructures, are considerable interesting due their physical properties and many potential applications like ultra-thin display and optoelectronics devices, surgical implants or sensors elements. In the last twenty year, the research of ordered nanoparticle surface was focused on search for a highly efficient and low-cost nanopattering method. In this work, we review a one of applications of thin film nanoporous anodized alumina (AA), which is used as deposition template for nanoparticles surface fabrication. It was necessary to involved many technologies such as lithographic method, self-assembly processes and scanning techniques. By using of this described method, large arrays of nanoparticles can be obtained on many substrates, such as gold, silicon and titanium, in range of several millimeters. This technique, in comparison with using of thick aluminum foil, has made possible fabrication of AA and subsequently nanowires without necessity to solve problems allied to manipulation and dissolving of remainder aluminum. The presented technique offers several advantages, like large pattern area, low equipment cost and high flexibility. However, there are many unsolved problems, which prevent to fabricate all required structures.

anodized alumina, nanopores, micro sensor, intermetallic layer

HRDÝ, R.; HUBÁLEK, J.

2007

20. 9. 2007

Ing. Zdeněk Novotný CSc. Brno

Brno

978-80-214-3470-7

EDS '07 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS

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