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HÉGR, O. BOUŠEK, J. FOŘT, T. PORUBA, A. BAŘINKA, R.
Original Title
Sputtered SiNx, AlN and SiC as passivation and ARC layers
Type
conference paper
Language
English
Original Abstract
Different types of mono-crystalline solar cell surfaces are presented in this article. Reactively sputtered layers of different compositions (SiNx, AlN and SiC) are used for passivation coatings on both cells sides. Sputtering technology gives the possibility to replace high-temperature processes which decrease surface and bulk defect density. Consequently, sputtering results in higher solar cell efficiency. Surface and bulk recombination parameters were measured by means of microwave photoconductivity decay (MW-PCD).
Keywords
silicon solar cell, surface passivation, sputtering, antireflection coating, silicon carbide, silicon nitride, aluminum nitride
Authors
HÉGR, O.; BOUŠEK, J.; FOŘT, T.; PORUBA, A.; BAŘINKA, R.
RIV year
2007
Released
20. 9. 2007
Publisher
Ing. Zdeněk Novotný CSc., Brno
Location
Brno
ISBN
978-80-214-3470-7
Book
Electronic Devices and Systems EDS´07
Edition number
1
Pages from
164
Pages to
167
Pages count
4
BibTex
@inproceedings{BUT24054, author="Ondřej {Hégr} and Jaroslav {Boušek} and Tomáš {Fořt} and Aleš {Poruba} and Radim {Bařinka}", title="Sputtered SiNx, AlN and SiC as passivation and ARC layers", booktitle="Electronic Devices and Systems EDS´07", year="2007", number="1", pages="4", publisher="Ing. Zdeněk Novotný CSc., Brno", address="Brno", isbn="978-80-214-3470-7" }