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TRIVEDI, R. ŠKODA, D. ČECH, V.
Original Title
AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer
Type
conference paper
Language
English
Original Abstract
The study of surface morphology and mechanical properties of plasma polymer films was carried out. The film was prepared from tetravinylsilane monomer by plasma-enhanced chemical vapor deposition (PECVD) employing an RF helical coupling system. The RF power and deposition time were varied for the deposited films of around 1 micron thickness, which was measured by spectroscopic ellipsometry.
Keywords
plasma polymerization, surface morphology, AFM, nanoindentation
Authors
TRIVEDI, R.; ŠKODA, D.; ČECH, V.
RIV year
2007
Released
13. 12. 2007
Pages from
1
Pages to
2
Pages count
BibTex
@inproceedings{BUT28347, author="Rutul Rajendra {Trivedi} and David {Škoda} and Vladimír {Čech}", title="AFM and nanoindentation analysis of plasma polymer films prepared from tetravinylsilane monomer", booktitle="New Perspectives of Plasma Science and Technology (CD medium)", year="2007", pages="1--2" }