Publication detail

Fabrication and Noise Diagnostics of Schottky Cathodes

KNÁPEK, A.

Original Title

Fabrication and Noise Diagnostics of Schottky Cathodes

English Title

Fabrication and Noise Diagnostics of Schottky Cathodes

Type

conference paper

Language

Czech

Original Abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper

English abstract

The paper introduces a method for fabrication and diagnostics of microscopic cathode based on Schottky field emission. Schottky emission is the predominant electron source technology in actual focused electron beam equipment, including scanning electron microscopy (SEM), transmission electron microscopy (TEM), Auger systems, and semiconductor inspection tools. Achieving proper results requires an electron source with the following ideal properties: small source size, low electron emission energy spread, high brightness (beam current per solid angle), low noise and long-term stability, simple and low-cost operation. Electrochemical etching procedure, used for producing extra-sharp tungsten cathode tips, together with suitable noise based analysis method are presented in the paper

Keywords

schottky emission, schottky cathodes, electrochemical etching

Key words in English

schottky emission, schottky cathodes, electrochemical etching

Authors

KNÁPEK, A.

RIV year

2009

Released

23. 4. 2009

Publisher

NOVPRESS

Location

nám. Republiky 15, 614 00, Brno,

ISBN

978-80-214-3870-5

Book

Proceedings of the 15th Conference, Student EEICT 2009, Volume 3

Pages from

142

Pages to

146

Pages count

5

BibTex

@inproceedings{BUT31380,
  author="Alexandr {Knápek}",
  title="Fabrication and Noise Diagnostics of Schottky Cathodes",
  booktitle="Proceedings of the 15th Conference, Student EEICT 2009, Volume 3",
  year="2009",
  pages="142--146",
  publisher="NOVPRESS",
  address="nám. Republiky 15, 614 00, Brno,",
  isbn="978-80-214-3870-5"
}