Publication detail

Experimental study of MEMS capacitive sensor

PEKÁREK, J. VRBA, R. FICEK, R. MAGÁT, M.

Original Title

Experimental study of MEMS capacitive sensor

Type

conference paper

Language

English

Original Abstract

This paper describes a new approach to pressure sensors development using capacitive principle. Novel pressure sensor has been achieved utilizing carbon nanotubes (CNTs) arrays as the surface increase element in capacitive sensor.

Keywords

Pressure sensor, capacity, carbon nanotubes, plasma enhanced chemical vapor deposition

Authors

PEKÁREK, J.; VRBA, R.; FICEK, R.; MAGÁT, M.

RIV year

2009

Released

2. 9. 2009

Publisher

Vysoké učení technické v Brně, Antonínská 548/1

Location

Brno

ISBN

978-80-214-3933-7

Book

EDS'09 IMAPS CS International Conference Proceedings

Edition number

1

Pages from

205

Pages to

209

Pages count

5

BibTex

@inproceedings{BUT31908,
  author="Jan {Pekárek} and Radimír {Vrba} and Richard {Ficek} and Martin {Magát}",
  title="Experimental study of MEMS capacitive sensor",
  booktitle="EDS'09 IMAPS CS International Conference Proceedings",
  year="2009",
  number="1",
  pages="205--209",
  publisher="Vysoké učení technické v Brně, Antonínská 548/1",
  address="Brno",
  isbn="978-80-214-3933-7"
}