Publication detail

Low Temperature Plasma for Surface Modification of Glass Substrates

PŘIKRYL, R., BÁLKOVÁ, R., SALYK, O., VANĚK, J.

Original Title

Low Temperature Plasma for Surface Modification of Glass Substrates

Type

conference paper

Language

English

Original Abstract

Plasma-enhanced chemical vapor deposition was used to prepare thin polymer films from hexamethyldisiloxane vapor.

Key words in English

plasma, mass spectroscopy, thin films, plasma polymerization

Authors

PŘIKRYL, R., BÁLKOVÁ, R., SALYK, O., VANĚK, J.

RIV year

2001

Released

1. 1. 2001

Publisher

Comenius University, Bratislava

Location

Bratislava

ISBN

8022315737

Book

13th Symposium on Application of Plasma Processes

Pages from

128

Pages to

129

Pages count

2

BibTex

@inproceedings{BUT3780,
  author="Radek {Přikryl} and Radka {Bálková} and Ota {Salyk} and Jan {Vaněk}",
  title="Low Temperature Plasma for Surface Modification of Glass Substrates",
  booktitle="13th Symposium on Application of Plasma Processes",
  year="2001",
  pages="2",
  publisher="Comenius University, Bratislava",
  address="Bratislava",
  isbn="8022315737"
}