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LOPOUR, F., ŠIKOLA, T., SPOUSTA, J., DITTRICHOVÁ, L., BÁBOR, P., DUARTE, J., MATĚJKA, F.
Original Title
Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams
Type
conference paper
Language
English
Original Abstract
Key words in English
Microstructures, SPM
Authors
RIV year
2001
Released
19. 4. 2000
Publisher
Editors: B. Michel, T. Winkler, M. Werner,H. Fecht
Location
Berlin
Pages from
919
Pages to
922
Pages count
4
BibTex
@inproceedings{BUT4036, author="Filip {Lopour} and Tomáš {Šikola} and Jiří {Spousta} and Libuše {Dittrichová} and Petr {Bábor} and Juan {Duarte} and František {Matějka}", title="Etching of Microstructures and Modification of Solid Surfaces by Low Energy Ion Beams", booktitle="MicroMat 2000", year="2000", pages="4", publisher="Editors: B. Michel, T. Winkler, M. Werner,H. Fecht", address="Berlin" }