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MÜLLEROVÁ, I., KONVALINA I.
Original Title
Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.
Type
journal article - other
Language
English
Original Abstract
The final image contrast in the scanning electron microscope (SEM) is not only a product of the interaction of primary electrons with the target, but the collection efficiency of the detector with its energy and angular distributions, as well as any subsequent signal processing, also play a role. In order to arrive at high signal-to-noise ratio, as many signal species should be caught as possible, though achieving a high contrast might require the selection of only a small part of the emission spectra. Multi-channel parallel detectors are promising in this respect.
Keywords
multi-channel detector, angular distribution, low energy electron microscope
Authors
Released
30. 7. 2006
ISBN
1431-9276
Periodical
MICROSCOPY AND MICROANALYSIS
Year of study
12
Number
2
State
United States of America
Pages from
1438
Pages to
1439
Pages count
BibTex
@article{BUT44384, author="Ilona {Müllerová} and Ivo {Konvalina}", title="Multi-Channel Detection of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope.", journal="MICROSCOPY AND MICROANALYSIS", year="2006", volume="12", number="2", pages="2", issn="1431-9276" }