Publication detail

An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization

ŠIKOLA, T., ARMOUR, D., VAN DEN BERG, J.

Original Title

An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization

Type

book chapter

Language

English

Authors

ŠIKOLA, T., ARMOUR, D., VAN DEN BERG, J.

RIV year

1994

Released

1. 1. 1994

Publisher

Institut für Ionenphysik, Universität Innsbruck

Location

Hintermoos/Maria Alm, Univ. Innsbruck,

Pages from

322

Pages to

328

Pages count

7

BibTex

@inbook{BUT51967,
  author="Tomáš {Šikola} and Dave {Armour} and Jaap {Van den berg}",
  title="An in situ study of processes taking place on a silicon surface during bombardment by CFx/Ar ions - etching versus polymerization",
  booktitle="SASP 94 - Symposium on atomic, cluster and surface physics",
  year="1994",
  publisher="Institut für Ionenphysik, Universität Innsbruck",
  address="Hintermoos/Maria Alm, Univ.  Innsbruck,",
  pages="7",
  isbn="0"
}