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STANKOVA, M., IVANOV, P., LLOBET, E., BREZMES, J., VILANOVA, X., GRACIA, I., CANÉ, C., HUBÁLEK, J., MALYSZ, K., CORREIG, X.
Original Title
Sputtered and screen-printed metal oxide-based integrated micro-sensor arrays for the quantitative analysis of gas mixtures
Type
abstract
Language
English
Original Abstract
Either by screen-printing or sputtering, sensitive layers of nanopowder tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an excellent fabrication yield. The sensor response to ethanol, acetone and ammonia vapours and their binary mixtures was studied. By using an integrated array of 4 microsensors operated at two different temperatures and a fuzzy ARTMAP neural network, it was possible to identify and quantify the different species (success rate was 100%). These results confirm the viability of the techniques introduced to obtain micromachined sensors suitable for battery-powered gas/vapour monitors.
Keywords
metal oxide, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis
Authors
Released
1. 1. 2003
ISBN
372-98603-1-9
Book
Eurosensors XVII
Pages from
665
Pages to
Pages count
1
BibTex
@{BUT187145 }