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SOLOVEI, D. HUBÁLEK, J.
Original Title
Electrochemical anodization as tool for nanostructures formation
Type
conference paper
Language
English
Original Abstract
In this paper we describe the methods of electrochemical anodization of valve metals such as aluminium, titanium, niobium, for formation of nanoscale and nanostructured functional layers in the form of nanoporous matric teplates, nanopillars and nanodots with the basic geometric parameters of 10 to 100 nm, for future use in sensor, as well as micro- and nanoelectronics.
Keywords
nanostructures, anodic oxidation, metal oxide
Authors
SOLOVEI, D.; HUBÁLEK, J.
RIV year
2011
Released
1. 6. 2011
Publisher
MU a MENDELU
Location
Brno
ISBN
978-80-7375-514-0
Book
XI. pracovní setkání fyzikálních chemiků a elektrochemiků
Edition
1
Edition number
Pages from
268
Pages to
271
Pages count
4
BibTex
@inproceedings{BUT75702, author="Dmitry {Solovei} and Jaromír {Hubálek}", title="Electrochemical anodization as tool for nanostructures formation", booktitle="XI. pracovní setkání fyzikálních chemiků a elektrochemiků", year="2011", series="1", number="1", pages="268--271", publisher="MU a MENDELU", address="Brno", isbn="978-80-7375-514-0" }