Publication detail
Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces
LÉTAL, P., TOMÁNEK, P., GRMELA, L.
Original Title
Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces
Type
conference paper
Language
English
Original Abstract
Near-field optical spectroscopy is an excellent tool to the nondesctructive inspection of the semiconductor interfaces. Its supperresolution is much better than that of the classical optical microscope.
Keywords
near-field optics, local spectroscopy, semiconductor, interface
Authors
LÉTAL, P., TOMÁNEK, P., GRMELA, L.
RIV year
2003
Released
19. 10. 2000
Location
Trnava
ISBN
80-227-1413-5
Book
8th CO-MAT-TECH 2000
Pages from
141
Pages to
146
Pages count
6
BibTex
@inproceedings{BUT7997,
author="Petr {Létal} and Pavel {Tománek} and Lubomír {Grmela}",
title="Near-field photocurrent spectroscopy: superresolving method for inspection of semiconductor interfaces",
booktitle="8th CO-MAT-TECH 2000",
year="2000",
pages="6",
address="Trnava",
isbn="80-227-1413-5"
}