Publication detail

Design and Fabrication of MEMS Low Power Heating Membrane

SVATOŠ, V. MÁRIK, M. PEKÁREK, J. SLAVÍK, J. CHOMOUCKÁ, J. HUBÁLEK, J.

Original Title

Design and Fabrication of MEMS Low Power Heating Membrane

Type

journal article - other

Language

English

Original Abstract

The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed – suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C.

Keywords

MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining.

Authors

SVATOŠ, V.; MÁRIK, M.; PEKÁREK, J.; SLAVÍK, J.; CHOMOUCKÁ, J.; HUBÁLEK, J.

RIV year

2012

Released

31. 12. 2012

Publisher

Fakulta Elektrotechnická ZČU v Plzni

Location

Plzeň

ISBN

1802-4564

Periodical

ElectroScope - http://www.electroscope.zcu.cz

Year of study

2012

Number

VI

State

Czech Republic

Pages from

1

Pages to

3

Pages count

3

BibTex

@article{BUT96352,
  author="SVATOŠ, V. and MÁRIK, M. and PEKÁREK, J. and SLAVÍK, J. and CHOMOUCKÁ, J. and HUBÁLEK, J.",
  title="Design and Fabrication of MEMS Low Power Heating Membrane",
  journal="ElectroScope - http://www.electroscope.zcu.cz",
  year="2012",
  volume="2012",
  number="VI",
  pages="1--3",
  issn="1802-4564"
}