Course detail
Microscopy and Spectroscopy
FSI-TMKAcad. year: 2010/2011
Optical microscopy:
This part of the course is focused on the microscope optical system, to the principle and fundamental image parameters, to the contrast-enhancing and special methods of of optical microscopy and optical spectroscopy.
Lesson is devoted to the material analysis of solids by secondary ion mass spectroscopy (SIMS), to physical principles and to applications mainly in semiconductor industry.
Photoelectron spectroscopy. Instrumentation. Photoemission and Auger emission process. Structure of photoelectron spectrum. Quantitative analysis. Angle resolved photoelectron spectroscopy.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
Work placements
Aims
The goal of the SIMS part of the lesson is to provide an overview of the ion-solid interaction phenomena and its utilization in the material analysis mainly by SIMS method not only at the macroscopic scale but at the analysis of nano-objects as well.
The goal of the XPS part of the lesson is to provide an overview of the wide field of novel materials and devices for nanoelectronics.
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
C. Kittel: Úvod do fyziky pevných látek 1997.
J. F. Ziegler, J. P. Biersack, M.D. Ziegler: SRIM The Stopping and Range of Ions in Matter, SRIM Co., 2008.
Kasap, Capper (Ed.) Springer Handbook of Electronic and Photonic Materials 2006.
R. G. Wilson, F. A. Stevie, and C. W. Magee: Secondary Ion Mass Spectrometry - a practical handbook for depth profiling and bulk analysis, John Wiley, 1989.
R. Waser (Ed.) Nanoelectronics and Information Technology 2005.
W. Eckstain: Computer Simulation of Ion-Solid Interaction, Springer-Verlag, 1991.
Recommended reading
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Type of course unit
Lecture
Teacher / Lecturer
Syllabus
- Principle of optical microscope, imaging system and parameters (compound microscope, conjugated planes, objective lens, substage condenser, eyepiece, illumination system and sources, magnification, aberrations, aplanatic systems, the Abbe theory of imaging, resolving power, point-spread function, optical transfer function)
- Special methods of microscopy (contrast-enhancing methods - dark field, Zernike phase contrast, Hoffman modulation contrast, oblique (anaxial) illumination, Nomarski differential interference contrast, polarization microscopy, Rheinberg illumination, fluorescence microscopy,
confocal microscopy, interference and holographic microscopy)
- Digital imaging in microscopy
- Advanced methods of optical microscopy and spectroscopy (living cells imaging, two-photon fluorescence, FRAP, FRET, STED, scanning near-field optical microscopy - SNOM, Raman spectroscopy, CARS)
SIMS:
Historical review of the ion-solid interaction investigation.
Modelling of the ion-solid interaction.
Products of the ion-solid interaction and their utilization in the analysis by following methods: SIMS, RBS, PIXE, ISS etc.
Principles of secondary ion mass spectrometry (SIMS).
Experimetal setup of SIMS.
Applications of SIMS method and practical examples.
XPS:
Introduction to photoelectron spectroscopy. Electron spectrometer and excitation sources (X-ray and electron sources, synchrotron).
The photoemission and Auger emission process. Photoelectron spectrum, satellite and loss structures, background. Structure, shape, width and intensity of photoelectron peaks, chemical shift.
Quantitative analysis. Electron transport through solid, layer thickness determination, angle resolved measurements.