Course detail

Plasma diagnostics

FCH-DCO_DIPAcad. year: 2011/2012

Course gives basic information about all metthods that could be used for the diagnostics of plasma and plasma processes. Besides various optical spectroscopic methods (emission, absorption, cavity ring down, laser induced fluorescence, actinometry) the spectroscopy of other electromagnetic radiation is disscussed. The next part is focused on various particle based diagnostics (mass spectroscopy, chromarography etc). The last part is focused on the measurement of electric characteristics and probe measurements.

Language of instruction

Czech

Mode of study

Not applicable.

Guarantor

prof. RNDr. František Krčma, Ph.D.

Department

Institute of Physical and Applied Chemistry (ÚFSCH)

Learning outcomes of the course unit

Plasma diagnostic methods overwiev and application of these methods in laboratory and industrial practice.

Prerequisites

Plasmachemistry
Mathematics
Physics
Physical Chemistry

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods depend on the type of course unit as specified in the article 7 of BUT Rules for Studies and Examinations.

Assesment methods and criteria linked to learning outcomes

Presentation about given diagnostic technique, discussion in wide range.

Course curriculum

1. Optical emission spectroscopy
principle of monochromator
detection by photomultiplyer
detection by semiconductor elements (including CCD)
spectrometer calibration - spectral sensitivity, apparatus function
determination of plasma composition
calculation of electron temperature from atomic spectrum
spectral line profile (natural, broadening, splitting)
Abel transformation
calculation of electron temperature from molecular spectrum
calculation of neutral gas temperature (rotational temperature)
vibrational temperature calculation
2. Optical absorption spectroscopy
application in different kinds of plasmas
absorption spectroscopy principle, basic equations
principles of laser light generation
principles of dye lasers
laser induced fluorescence (LIF, TALIF)
cavity ring down spectroscopy (CRD)
Raman scattering
3. Electric measurements in plasmas
single Langmuir probe
double Langmuir probe
triple probe
measuring of voltage and current in pulsed systems
4. Other plasma diagnostic methods
schlier photography
EPR spectroscopy
gas chromatography

Work placements

Not applicable.

Aims

Intoduction to the methods applied for the plasma diagnostics including the actually developed techniques and non-conventional procedures.

Specification of controlled education, way of implementation and compensation for absences

no controll

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

F. Chen, J. P. Chang: Principles of Plasma Processing, Kluwer Academic/ Plenum Publishers 2003, 0 (CS)

VUT

Faculties

University Institutes

Parts

Plasma diagnostics