The structure of the lecture includes a definition of basic terms; introduction to vacuum science, plasma physics, and plasma chemistry; vacuum and plasma technologies for thin film deposition: vacuum evaporation, sputtering, plasma polymerization, the use of lasers for thin film deposition, chemical vapor deposition; characterization of thin films: film growth, determination of film thickness, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measuring techniques, tension, adhesion).