26 hod., optionally

Gas, vapour, pressure. Basic principles and laws for the ideal gases. Kinetic theory of gases - basic principles. Mean free path of gas molecules. Thermal velocity of gas molecules, Maxwell-Boltzmann statistic.
Pumping processes. Gas transport through vacuum pipes, gas conductance of vacuum pipes. Influence of leakage and desorption. Surface processes. Different types of gas transport - turbulent, viscose, molecular and effusion.
Basic principles of gas transport - transport and getter pumps. Mechanical pumps, Roots blowers, turbo pumps. Diffusion pumps. Getter pumps.
The basic principles of vacuum equipment design. Basic technologies in the vacuum equipment production.
Electronic circuits for electro-vacuum instruments. High voltage power sources, high frequency generators. Circuits for very low current measurement. Circuits for the potential isolation, electronic protection circuits.
Devices based on gas volume and gas particle properties. Thermocouple gauges, Pirani gauges, mass flow-meters. Ion gauges.
Devices based on trajectory control of charged particles thermal emission, ionization, electromagnetic and electrostatic deflection.
Devices based on trajectory control of charged particles mass spectrometers.
Devices based on trajectory control of charged particles electron microscopes.
Devices based on usage of cryogenic technology - cryogenic technology in electro-vacuum technology, cryogenic and cryosorption pumps.
Devices based on usage of cryogenic technology - superconductivity, exploitation of superconductivity.
Devices based on usage of gas dicharges - types of discharges, examples of their exploitation. Plasma parameters, measurement of plasma parameters.
Devices based on usage of gas dicharges - cathode sputtering, plasma deposition from gas phase, plasma etching. Titanium discharge pump, ionic pump.

12 hod., compulsory

Gas, vapour, pressure, Measurement units and their relation. Laws for the ideal gases. Kinetic theory of gases. basic principles. Relation between pressure, concentration and temperature of gas.
The thermal velocity of the gas molecules, Maxwell-Boltzmann statistic. The mean free path of gas molecules. Volume processes and transport of gas, diffusion, viscosity of gas, thermal conductivity of gas.
The gas transport through the vacuum pipes. Gas conductance of Vacuum pipes. Ohms law in gas transport. The volume and mass flow of the gas. The different mechanism of the gas transport - turbulent, viscose, molecular, effusion.
The limit pressure of the vacuum equipment. Pumping speed of the vacuum pumps and its measurement, the exhaust time. The influence of leakage and desorption.
The surface processes, adsorption, desorption, monomolecular and multimolecular layers, basic adsorption isotherms, saturated vapour pressure.
The basic principles of vacuum equipment design.