Course detail
Principles of Equipment for Physical Technologies
FSI-TPZ-AAcad. year: 2016/2017
The course gives summary of high technologies for deposition of thin films and multilayers, coatings, etching of surfaces, alloying, annealing of materials and fabrication of nanostructures. Course primarily gives an explanation of physical principles of these processes and describes physical background of the corresponding experimental tools.
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Offered to foreign students
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Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
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Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
D. HALLIDAY, R. RESNICK, J. WALKER: Fyzika. (2. přepracované vydání.) VUTIUM, Brno 2013 (CS)
CHEN, F. F.: Úvod do fyziky plazmatu
J. C. RIVIERE: Surface Analytical Techniques, Clarendon Press, Oxford 1990 (EN)
L. ECKERTOVÁ: Fyzikální elektronika pevných látek, Karolinum, Praha 1992 (CS)
VÁLYI, L.: Atom and Ion Sources
Recommended reading
ECKERTOVÁ, L.: Fyzika tenkých vrstev
RIVIERE, J. C.: Surface Analytical Techniques
Classification of course in study plans
Type of course unit
Lecture
Teacher / Lecturer
Syllabus
Summary and characterization of selected physical technologies and analytical methods.
Application of physical technologies: from surfaces to nanotechnologies.
Principles and tools of physical technologies.
Electron sources (Electron emission, Extraction and forming of electron beams, Particle optical aberrations, Design of electron beam sources).
Ion beam sources (Ion preparation methods, Electron impact ion beam sources, Plasma, Ion extraction from plasma, Extraction ad forming of ion beams, Ion beam parameters, Plasma ion beam sources).
Atomic and molecular beam sources (Atomic source overview, Gas effusion, Angular distribution of particle flux from the slit, Emissive diagram of neutral beam particle sources, Collimator, Thermal atomic beam sources).
Fundamentals of particle optics (Analogy between particle and geometrical optics, Laplace equation, Paraxial equation of trajectory, Role of lenses in particle optics, Analytical methods in particle optics, Particles in magnetic fields, Scheme of the simple particle optic system, Distribution of the potential on the axis, Computer simulation of ion and electron beams, Space charge).
Interaction of particles with solids (Interaction of electrons and ions with surfaces, Scattering, Sputtering, Channelling, Interaction spectra)
Physical technologies (Deposition of thin films and coatings: CVD, PECVD, PVD, magnetron sputtering, ion beam sputtering, direct ion beam deposition, plasma and ion beam etching, lithography, implantation, epitaxy: MBE, MOMBE).
New trends in physical technologies.
Exercise
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Computer-assisted exercise
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Syllabus