Course detail

Preparation and properties of thin layers of materials

FCH-DCO_PTVAcad. year: 2018/2019

Terminology; fundamentals of vacuum science; introduction to plasma physics and chemistry; film deposition techniques: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD, CVD processes; thin film characterization: film growth, film thickness and deposition rate, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measurement techniques, internal stress, adhesion).

Language of instruction

Czech

Mode of study

Not applicable.

Guarantor

prof. RNDr. Vladimír Čech, Ph.D.

Department

Faculty of Chemistry (FCH)

Learning outcomes of the course unit

Advanced technologies and analyses of thin films.

Prerequisites

An introduction to thin films.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

The course uses teaching methods in form of individual consultation. The e-learning system (LMS Moodle) is available to teachers and students.

Assesment methods and criteria linked to learning outcomes

Entrance written test and oral exam.

Course curriculum

Introduction / information sources
Fundamentals of vacuum science
Introduction to plasma physics and chemistry
Physical vapor deposition
Chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Film growth
Film thickness
Scanning probe microscopy
Mechanical properties
Case study

Work placements

Not applicable.

Aims

Advanced technologies and analyses of thin films are the aims of this subject.

Specification of controlled education, way of implementation and compensation for absences

Optional attendance at lectures.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

D. Hoffman, B. Singh, J.H. Thomas, Handbook of Vacuum Science and Technology, Academic Press 1998. (CS)
M. Ohring, Materials Science of Thin Films, Academic Press 2002. (CS)
V. L. Mironov, Fundamentals of Scanning Probe Microscopy, NT-MDT 2004. (CS)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme DPCP_CHM_4 Doctoral

    branch DPCO_CHM_4 , 1 year of study, winter semester, compulsory-optional

  • Programme DPAP_CHM_4 Doctoral

    branch DPAO_CHM_4 , 1 year of study, winter semester, compulsory-optional

  • Programme DKCP_CHM_4 Doctoral

    branch DKCO_CHM_4 , 1 year of study, winter semester, compulsory-optional

  • Programme DKAP_CHM_4 Doctoral

    branch DKAO_CHM_4 , 1 year of study, winter semester, compulsory-optional

  • Programme AKREDITACE Doctoral 1 year of study, winter semester, compulsory-optional