English

Not applicable.

1. Knowledge of physics of low pressures, gas transport, capturing and releasing gases by solids and liquids, condensation of gases and evaporation of liquids and solids.
2. Acquirement of an overview of vacuum technologies utilized in laboratories and industry both for investigation in chemistry and fabrication of materials and devices.
3. Introduction of particular vacuum facilities utilized in faculty laboratories and partner's universities and Academy of sciences
4. Introduction into thin film and solid surface technology

Knowledge of fundamentals of physics – level of the basic course of physics in technical universities, mainly parts of Mechanics and Kinetic theory of gases and Thermodynamics.

Not applicable.

The course uses teaching methods in form of Lecture - 2 teaching hours per week. The e-learning system (LMS Moodle) is available to teachers and students.

Requirements according to submitted content in accordance the content of the lectures.
(lectures - in sum 26 lessons in 13 lectures). Evaluation by examination after compleeting the course, eventually by a project according to agreement.

Vacuum technology Subject content
The subject is divided into 5 chapters and 13 two-hour lectures:

A. Physical fundamentals of vacuum technology
1. Fundamental laws of gas state
2. Gas, vapour, ideal gas, basic laws, state equation
3. Kinetic theory of gases
4. Velocity distribution of molecules, kinetics explanation of pressure, mean free path of molecules and its meaning
5. Transport phenomena
6. Diffusion, thermal conductivity of gases, gas viscosity
7. Gas convection
8. Basic terms, kinds of convection, formulas for conductivity calculation
9. Processes performing on the walls of vacuum systems
10. Interaction of molecules with system walls, sorption and desorption, vapour pressure, evaporation
11. Processes performing inside of the walls of vacuum systems
12. Capillary condensation, convection and swallowing of gases by porous maters, penetration of gases through compact maters

B. Vacuum acquiring
1. Theory of pumping process
2. Pumping process in time, effect of piping, and leak
3. Pumps classification and parameters
4. Pumps classification according to principle, pump parameters
5. Transport pumps with periodically change of volume
6. Rotary pumps, membrane pumps and piston pumps.
7. Transport pumps working on principle of momentum transfer
8. Roots pumps, diffusion pumps and their accessories, molecular and turbomolecular pumps
9. Pumps based on gas bonding
10. Pumps cryogenic and cryosorption, ion pumps, getter pumps

C. Measurement in vacuum technology
1. Introduction
2. Quantities and units, vacuum ranges, classification and vacuometer parameters
3. Total pressure measurements
4. Liquid and compression vacuometers, thermal vacuometers, membrane vacuometers, viscous vacuometers, ionisation vacuometers
5. Partial pressure measurements
6. Principles of mass spectrometers, mass spectrometers measurements
7. Gas flow measurements, pumping rate measurement
8. Vacuometers calibration
9. Vacuum facilities leak detection
10. Overview of vacuum leak detection, principles and operating of helium leak detector

D. Materials for vacuum technology
1. Requirements for vacuum utilize materials
2. Overview of materials and their application for vacuum technology

E. Vacuum apparatus
1. Construction parts of vacuum apparatus
2. Vacuum chambers, piping, fixed connection, mounted connection, valves and feedthroughs
3. Vacuum apparatus for rough and fine vacuum
4. Pumps cooperation, typical applications, pumping of aggressive and condensing gases
5. Vacuum apparatuses for high vacuum
6. Conception of high vacuum apparatuses, their operation and typical application
7. Ultrahigh vacuum apparatuses
8. Conception of UHV apparatuses, their operation and typical application
9, Cleaning technique, vacuum hygiene

F. Excursion into faculty laboratories with vacuum facilities and their function demonstration

Not applicable.

1. Users knowledge of vacuum devices and technologies
2. Overview of vacuum application in solid surface investigation and particle beam techniques
3. Overview of vacuum application in fabrication for solid surface treatment, thin film coating including plasma technics and inert atmosphere assurance

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Vacuum Technology, www.pfeiffer-vacuum.net (EN)

Not applicable.