Přístupnostní navigace
E-application
Search Search Close
Course detail
FCH-BAO_TPVAcad. year: 2020/2021
Terminology; fundamentals of vacuum science; introduction to plasma physics and chemistry; film deposition techniques: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD, CVD processes; thin film characterization: film growth, film thickness and deposition rate, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measurement techniques, internal stress, adhesion).
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Offered to foreign students
Learning outcomes of the course unit
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
Course curriculum
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
Recommended literature
Elearning
Classification of course in study plans
branch BPCO_SCH , 1 year of study, summer semester, elective
branch NPCO_CHM , 1 year of study, summer semester, elective
Lecture
Teacher / Lecturer