Course detail

Microtechnologies

CEITEC VUT-DS107Acad. year: 2020/2021

Not applicable.

Language of instruction

Czech

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaromír Hubálek, Ph.D.

Department

Central European Institute of Technology BUT (CEITEC VUT)

Learning outcomes of the course unit

Not applicable.

Prerequisites

Not applicable.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Not applicable.

Assesment methods and criteria linked to learning outcomes

Not applicable.

Course curriculum

Not applicable.

Work placements

Not applicable.

Aims

Not applicable.

Specification of controlled education, way of implementation and compensation for absences

Not applicable.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1,2, Edited by P. Rai-Choudhury. Society of Photo-Optical Instrumentation Engineers, 1997 (EN)
Marc J. Madou, Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set. CRC Press, 2011 (EN)
Tai-Ran Hsu, MEMS & Microsystems: Design, Manufacture, and Nanoscale Engineering. Wiley, 2008 (EN)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme STIAMN Doctoral

    branch AM , 1 year of study, winter semester, compulsory-optional
    branch ANTMT , 1 year of study, winter semester, compulsory-optional