Course detail

Diagnostic Methods in Electroengineering

FEKT-MKC-DMEAcad. year: 2021/2022

Organization of testing in Czech Rep. and EU. Diagnostic methods for evaluation of properties and parameters of electroinsulating materials and systems. Diagnostic methods for evaluation of properties of semiconductor wafers and structures, of contamination and defects in semiconductor materials. Diagnostic methods based on exploitation of electron beam for evaluation of structure and composition of materials. Theory of evaluation of measured data.

Language of instruction

Czech

Number of ECTS credits

6

Mode of study

Not applicable.

Guarantor

Ing. Pavel Čudek, Ph.D.

Department

Department of Electrical and Electronic Technology (UETE)

Learning outcomes of the course unit

At the end of the course, the student will be able to:
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.

Prerequisites

Knowledge of electrical materials on the level of the bachelor's course Diagnostics and Testing.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods include lectures, numerical exercises and practical laboratories. Course is taking advantage of e-learning system. Students have to write a single project during the course.

Assesment methods and criteria linked to learning outcomes

up to 40 points during the semester (10 points from laboratory seminars and 30 points from individual work and its presentation)
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.

Course curriculum

1. Overview of optical microscopy methods. Lens geometry and defects. Microscopic observations. Methods of measuring layer thickness, diagnostic observations.
2. Scanning and transmission electron microscopy. Methods of environmental scanning electron microscopy. Electron sources, electron optics, 3. resolution, depth of field.
3. Diagnostic methods based on electron-solid interaction. Elastic inelastic scattering. Emission of backscattered and secondary electrons, their detection and use in scanning electron microscopy. EBIC method.
4. Spectroscopic methods and their overview. Principle of excitation spectra. Origin of characteristic and continuous X-rays. X-ray spectral microanalysis. EDS and WDS methods.
5. Methods of raster tip microscopy. Raster tunneling microscopy and atomic force microscopy. Physical principles. Potential applications in the diagnosis of the viscous properties of materials.
6. Diffraction, diffraction and diffractometric methods. X-ray diffraction methods, electron and neutron diffraction.
7. Powder X-ray diffraction spectroscopy, theoretical assumptions, application radius, instrumentation, interpretation of diffraction spectra, sample preparation.
8. Diagnostic methods related to the determination of the influence of operating and transport conditions on the properties of materials.
9. Overview of diagnostic methods related to the safety of electrical objects.
10. Statistical analysis of univariate data. Sampling characteristics. Point and interval estimation of normal and exponential distribution parameters.
11. Diagnostics, reliability and testing. Organisation of testing and certification in the Czech Republic. Basic concepts of technical diagnostics, overview of diagnostic methods.

Work placements

Not applicable.

Aims

The aim of the course is to acquaint students with theory of diagnostic methods used for evaluation of properties and parameters of electroinsulating and semiconductor materials and structures, with theoretical principles of methods based on exploitation of electron beam for evaluation of structure and composition of material systems as well as with principles of evaluation of measured data.

Specification of controlled education, way of implementation and compensation for absences

Obligatory participation in teaching.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Frank,L., Král,J.: Metody analýzy povrchů. Iontové, sondové a speciální metody. Academia, Praha,2002 (CS)
Ifan Hughes, Thomas Hase; Measurements and their Uncertainties: A practical guide to modern error analysis; Oxford University Press; 2010 (CS)
Jirák, J., Havlíček, S., Rozsívalová, Z.: Diagnostika a zkušebnictví. Elektronické texty, Brno 2002. (CS)
Koblížek,V. Měření a kontrola v elektrotechnologii ČVUT Praha,1991. (CS)
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)

Recommended reading

Mentlík, V., Pihera, J. a kol.: Diagnostika elektrických zařízení. BEN 2008, ISBN 978-80-7300-2 (CS)

Elearning

eLearning: currently opened course

Classification of course in study plans

  • Programme MPC-EVM Master's 2 year of study, winter semester, compulsory

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

Ing. Ondřej Čech, Ph.D.
Ing. Pavel Čudek, Ph.D.
Ing. Kristýna Jandová, Ph.D.

Syllabus

Diagnostics and testing. Organization of testing and certification in CR and EU. Summary of diagnostic methods.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in DC electric field.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at frequency 50 Hz and at high voltage.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at middle and high frequency.
Diagnostic methods connected with evaluation of influence of working conditions on materials properties.
Diagnostic methods for evaluation of electrical properties of semiconductor wafers and structures. Resistivity measurements, four-point probe, spreading resistance, concentration-depth profile. Methods based on evaluation of capacitance-voltage measurement.
Diagnostic methods for contamination and defect detection in semiconductor materials. Microscope techniques. AFM, AES, ESCA and SIMS techniques.
Diagnostic methods based on interaction of electrons with solid. Electron optics, resolution and depth of focus. Electron scattering and diffusion.
Diagnostic methods based on interaction of electrons with solid. Emission of electrons and X-ray quanta. Backscattered electrons and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Detectors and signal processing. Imaging with backscattered and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Diffraction crystal structure analysis. Elemental analysis.
Statistic analysis of one-dimensional data. Random sampling characteristics. Spot and interval parameters estimation of normal, exponential and Weibull's distribution.
Tests of hypotheses. Tests for identification of gross errors, Dixon`s test, Grubs`s test. Tests of sampling distribution coincidence. Chi squared test, Kolmogorov`s test. Test of coincidence or difference of two variables.

Laboratory exercise

39 hod., compulsory

Teacher / Lecturer

Ing. Ondřej Čech, Ph.D.
Ing. Pavel Čudek, Ph.D.

Syllabus

Diagnostics of electroinsulating materials and systems on bases of evaluation of absorption characteristics.
Diagnostics of electroinsulating materials and systems on bases of evaluation of components of complex permitivity at frequency 50 Hz and at high voltage.
Diagnostics of electroinsulating materials and systems on bases of evaluation of components of complex permitivity at middle and high frequencies.
Scanning electron microscopy, specimen observation with individual detectors, evaluation of obtained information.
Work on X-ray microanalyzer. Evaluation of spectra.

Elearning

eLearning: currently opened course