Course detail
Diagnostic Methods in Electroengineering
FEKT-MKC-DMEAcad. year: 2022/2023
Organization of testing in Czech Rep. and EU. Diagnostic methods for evaluation of properties and parameters of electroinsulating materials and systems. Diagnostic methods for evaluation of properties of semiconductor wafers and structures, of contamination and defects in semiconductor materials. Diagnostic methods based on exploitation of electron beam for evaluation of structure and composition of materials. Theory of evaluation of measured data.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Learning outcomes of the course unit
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.
Prerequisites
Co-requisites
Planned learning activities and teaching methods
Assesment methods and criteria linked to learning outcomes
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.
Course curriculum
1. Overview of optical microscopy methods. Lens geometry and defects. Lens and eyepiece. Characteristic values of an optical microscope. Microscopic observations.
2. Scanning and transmission electron microscopy. Methods of environmental scanning electron microscopy. Sources of electrons, physical properties of electrons, electron optics, defects in electromagnetic lenses, characteristic values of the scanning electron microscope.
3. Diagnostic methods based on the interaction of electrons with solid matter. Elastic inelastic scattering. Emission of back-reflected and secondary electrons, their detection and use in scanning electron microscopy. EBIC method.
4. Spectroscopic methods and their overview. Principle of excitation spectra. Origin of characteristic and continuous X-rays. X-ray spectral microanalysis. EDS and WDS methods.
5. Methods of raster tip microscopy. Raster tunneling microscopy and atomic force microscopy. Physical principles. Applications in the diagnosis of physical properties of materials.
6. Diffraction, diffraction and diffractometric methods. X-ray diffraction methods, electron and neutron diffraction.
7. Powder X-ray diffraction spectroscopy, theoretical assumptions, application radius, instrumentation, interpretation of diffraction spectra, sample preparation.
8. Diagnostic methods related to the determination of the influence of operating and transport conditions on the properties of materials.
9. Overview of diagnostic methods related to the safety of electrical objects.
10. Statistical analysis of univariate data. Sampling characteristics. Point and interval estimation of normal and exponential distribution parameters.
11. Diagnostics, reliability and testing. Organisation of testing and certification in the Czech Republic. Basic concepts of technical diagnostics, overview of diagnostic methods.
Work placements
Aims
Specification of controlled education, way of implementation and compensation for absences
Recommended optional programme components
Prerequisites and corequisites
Basic literature
Ifan Hughes, Thomas Hase; Measurements and their Uncertainties: A practical guide to modern error analysis; Oxford University Press; 2010 (CS)
Jirák, J., Havlíček, S., Rozsívalová, Z.: Diagnostika a zkušebnictví. Elektronické texty, Brno 2002. (CS)
Koblížek,V. Měření a kontrola v elektrotechnologii ČVUT Praha,1991. (CS)
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)
Recommended reading
Elearning
Classification of course in study plans
- Programme MPC-EVM Master's 2 year of study, winter semester, compulsory
Type of course unit
Lecture
Teacher / Lecturer
Syllabus
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in DC electric field.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at frequency 50 Hz and at high voltage.
Diagnostic methods for evaluation of properties of electroinsulating materials and systems in electric field at middle and high frequency.
Diagnostic methods connected with evaluation of influence of working conditions on materials properties.
Diagnostic methods for evaluation of electrical properties of semiconductor wafers and structures. Resistivity measurements, four-point probe, spreading resistance, concentration-depth profile. Methods based on evaluation of capacitance-voltage measurement.
Diagnostic methods for contamination and defect detection in semiconductor materials. Microscope techniques. AFM, AES, ESCA and SIMS techniques.
Diagnostic methods based on interaction of electrons with solid. Electron optics, resolution and depth of focus. Electron scattering and diffusion.
Diagnostic methods based on interaction of electrons with solid. Emission of electrons and X-ray quanta. Backscattered electrons and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Detectors and signal processing. Imaging with backscattered and secondary electrons.
Diagnostic methods based on interaction of electrons with solid. Diffraction crystal structure analysis. Elemental analysis.
Statistic analysis of one-dimensional data. Random sampling characteristics. Spot and interval parameters estimation of normal, exponential and Weibull's distribution.
Tests of hypotheses. Tests for identification of gross errors, Dixon`s test, Grubs`s test. Tests of sampling distribution coincidence. Chi squared test, Kolmogorov`s test. Test of coincidence or difference of two variables.
Laboratory exercise
Teacher / Lecturer
Syllabus
Diagnostics of electroinsulating materials and systems on bases of evaluation of components of complex permitivity at frequency 50 Hz and at high voltage.
Diagnostics of electroinsulating materials and systems on bases of evaluation of components of complex permitivity at middle and high frequencies.
Scanning electron microscopy, specimen observation with individual detectors, evaluation of obtained information.
Work on X-ray microanalyzer. Evaluation of spectra.
Elearning