Course detail

Diagnostics and Testing

FEKT-MPA-DMEAcad. year: 2022/2023

Diagnostic methods for determining properties and parameters of electrical insulating materials and systems. Microscopic, spectroscopic and diffractometric diagnostic methods, physical principles and applications. Diagnostic methods for determining the properties of semiconductor wafers and structures, contamination and defects in semiconductor materials. Processing and evaluation of measured data. Translated with www.DeepL.com/Translator (free version) 

Language of instruction

English

Number of ECTS credits

6

Mode of study

Not applicable.

Guarantor

Ing. Pavel Čudek, Ph.D.

Department

Department of Electrical and Electronic Technology (UETE)

Learning outcomes of the course unit

At the end of the course, the student will be able to:
- describe theoretical basis of electrical and physical diagnostics methods used for determination of properties, parameters and composition of electrical materials,
- explain general base of processing and evaluating of measured data,
- describe organization of testing and certification in Czech Republic and in European Union,
- define legislative requirements in the field of metrology,
- be knowledgeable in diagnostics methods, plan usage of suitable method for concrete application, including of simple interpretation of obtained information.

Prerequisites

Knowledge of electrical materials on the level of the bachelor's course Diagnostics and Testing.

Co-requisites

Not applicable.

Planned learning activities and teaching methods

Teaching methods include lectures, numerical exercises and practical laboratories. Course is taking advantage of e-learning system. Students have to write a single project during the course.

Assesment methods and criteria linked to learning outcomes

up to 40 points during the semester (20 points from laboratory seminars and 20 points from individual work and its presentation)
up to 60 points from written final exam
Final exam is focused on verification of knowledge and orientation in the field of diagnostics methods and organization of testing.

Course curriculum

1. Overview of optical microscopy methods. Lens geometry and defects. Lens and eyepiece. Characteristic values of an optical microscope. Microscopic observations.

2. Scanning and transmission electron microscopy. Methods of environmental scanning electron microscopy. Sources of electrons, physical properties of electrons, electron optics, defects in electromagnetic lenses, characteristic values of the scanning electron microscope.

3. Diagnostic methods based on the interaction of electrons with solid matter. Elastic inelastic scattering. Emission of back-reflected and secondary electrons, their detection and use in scanning electron microscopy. EBIC method.

4. Spectroscopic methods and their overview. Principle of excitation spectra. Origin of characteristic and continuous X-rays. X-ray spectral microanalysis. EDS and WDS methods.

5. Methods of raster tip microscopy. Raster tunneling microscopy and atomic force microscopy. Physical principles. Applications in the diagnosis of physical properties of materials.

6. Diffraction, diffraction and diffractometric methods. X-ray diffraction methods, electron and neutron diffraction.

7. Powder X-ray diffraction spectroscopy, theoretical assumptions, application radius, instrumentation, interpretation of diffraction spectra, sample preparation.

8. Diagnostic methods related to the determination of the influence of operating and transport conditions on the properties of materials.

9. Overview of diagnostic methods related to the safety of electrical objects.

10. Statistical analysis of univariate data. Sampling characteristics. Point and interval estimation of normal and exponential distribution parameters.

11. Diagnostics, reliability and testing. Organisation of testing and certification in the Czech Republic. Basic concepts of technical diagnostics, overview of diagnostic methods. Translated with www.DeepL.com/Translator (free version) 

Work placements

Not applicable.

Aims

The aim of the course is to acquaint students with theory of diagnostic methods used for evaluation of properties and parameters of electroinsulating and semiconductor materials and structures, with theoretical principles of methods based on exploitation of electron beam for evaluation of structure and composition of material systems as well as with principles of evaluation of measured data.

Specification of controlled education, way of implementation and compensation for absences

Obligatory participation in teaching.

Recommended optional programme components

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

C. J. Gilmore, J. A. Kaduk and H. Schenk: International Tables for Crystallography Volume H: Powder diffraction, 2019 (EN)
Ifan Hughes, Thomas Hase; Measurements and their Uncertainties: A practical guide to modern error analysis; Oxford University Press; 2010 (EN)
OĆonnor, D.J. and others: Surface Analysis Methods in Materials Science. Springer Berlin 2003. ISBN0931-5195 (EN)
Reimer,L.:Scanning electron microscopy,Springer Verlag Berlin,2005 (EN)
Van Zant, P.: Microchip fabrication. Fourth edition. McGraw-Hill Publication. New York, 2000. (EN)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme MPA-EEN Master's 2 year of study, winter semester, compulsory-optional
  • Programme MPC-EVM Master's 0 year of study, winter semester, compulsory-optional

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

Ing. Pavel Čudek, Ph.D.

Laboratory exercise

39 hod., compulsory

Teacher / Lecturer

Ing. Pavel Čudek, Ph.D.