Course detail

Thin Films

FCH-BAO_TPVAcad. year: 2023/2024

Terminology; fundamentals of vacuum science; introduction to plasma physics and chemistry; film deposition techniques: vacuum evaporation, sputtering, plasma polymerization, laser-enhanced CVD, CVD processes; thin film characterization: film growth, film thickness and deposition rate, scanning probe microscopy (STM, AFM, EFM, MFM, SNOM), mechanical properties (measurement techniques, internal stress, adhesion).

Language of instruction

English

Number of ECTS credits

4

Mode of study

Not applicable.

Guarantor

prof. RNDr. Vladimír Čech, Ph.D.

Department

Institute of Materials Science (ÚCHM)

Offered to foreign students

Of all faculties

Entry knowledge

Basic chemistry and physics.

Rules for evaluation and completion of the course

Entrance written test and oral exam are aimed at basic knowledge about thin film technologies and thin film characterization.
Optional attendance at lectures.

Aims

Knowledge about advanced technologies and analyses of thin films is the aims of this subject.
Students acquire basic knowledge about thin-film technology, characterization and application. They can use this knowledge in their diploma thesis and later as technologists and researchers.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

D. Hoffman, B. Singh, J.H. Thomas, Handbook of Vacuum Science and Technology, Academic Press 1998 (EN)
M. Ohring, Materials Science of Thin Films, Academic Press 2002 (EN)
N. Inagaki, Plasma Surface Modification and Plasma Polymerisation. Lancaster: Technomic Publ., 1996 (EN)
V. L. Mironov, Fundamentals of Scanning Probe Microscopy, NT-MDT 2004 (EN)

Recommended reading

Not applicable.

Elearning

eLearning: currently opened course

Classification of course in study plans

  • Programme NPAP_ENVI Master's 1 year of study, summer semester, elective

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

prof. RNDr. Vladimír Čech, Ph.D.

Syllabus

Introduction / information sources
Fundamentals of vacuum science
Introduction to plasma physics and chemistry
Physical vapor deposition
Chemical vapor deposition
Plasma-enhanced chemical vapor deposition
Film growth
Film thickness
Scanning probe microscopy
Mechanical properties
Case study

Elearning

eLearning: currently opened course