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FEKT-BKC-MMSAcad. year: 2023/2024
Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.
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Laboratory exercise
Introduction, administration and organisation, safety at work. Practical fundamental of microelectronic technology, Laboratory project.Measurement of position.Measurement of temperature.Measurement of pressure. Measurement of vibrations and inclination. Measurement of light intensity. Measurement of conductivity and pH.Measurement of chemicals in liquids.Measurement of gases.Special sensors.Consultations by lab project. Free topic.Examen test.