Course detail

Microelectronic technologies

FEKT-DKC-ME2Acad. year: 2023/2024

The subject is focused on a study of the microelectronic technologies using seminary and self-study. Students will take-up overview about elemental and advanced methods and techniques, material utilization, and rules for microstructure creation. They will know how to take bearings in areas of the design and fabrication, as well about utilization of nanotechnologies in microelectronics.

Language of instruction

Czech

Number of ECTS credits

4

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaromír Hubálek, Ph.D.

Department

Department of Microelectronics (UMEL)

Entry knowledge

no

Rules for evaluation and completion of the course

Evaluation of oral exam according to prepared presentation, understanding, ability to present topic and references studied.

Aims

Student is going to familiarize with the elemental and advanced methods and techniques for the microstructures and semiconductor devices fabrication, with materials, rules for their creation and modern nanotechnologies in semiconductor industry.
Preview of the mehods and techniques in thin-film and semicoductor technology, design skill of the microstructures and nanostructures using advanced techniques of fabrication.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

MEMS and Nanotechnology Clearinghouse, http://www.memsnet.org (EN)
TJ. Coutts, Active and Passive Thin Film Device. Academic Press, London 1978, pp.1-858 (EN)

Recommended reading

Courtesy Sandia National Laboratories, SUMMiTTM Technologies, www.mems.sandia.gov (EN)
C.T. Leondes, MEMS/NEMS Handbook: Techniques and Applications, Vol. 1-5. Springer Science, 2006 (EN)
H.O. Pierson, Handbook of Chemical Vapor Deposition. William Andrew Publishing, LLC Norwish, NY, USA, 1999, ISBN 0-8155-1432-8 (EN)
H.S. Nalez, Handbook of Organic-Inorganic Hybrid Materials and Nanocoposities, Vol. 1-2, American Scientific Publisher, 2003. (EN)
M.A. Reed and T. Lee, Molecular Nanoelectronics. American Scientific Publisher, 2003, ISBN 1-58883-006-3 (EN)
Michael Kraft: Micromachined Inertial Sensors Recent Developments at BSAC, prezentace, Berkeley Sensor &Actuator Center, California,USA (EN)
S. Sivaram, Chemical Vapor Deposition. International Thomson Publishing Inc., 1995, ISBN 0-442-01079-6 (EN)

Classification of course in study plans

  • Programme DKC-TLI Doctoral 0 year of study, summer semester, compulsory-optional
  • Programme DKC-TEE Doctoral 0 year of study, summer semester, compulsory-optional
  • Programme DKC-SEE Doctoral 0 year of study, summer semester, compulsory-optional
  • Programme DKC-MET Doctoral 0 year of study, summer semester, compulsory-optional
  • Programme DKC-KAM Doctoral 0 year of study, summer semester, compulsory-optional
  • Programme DKC-EKT Doctoral 0 year of study, summer semester, compulsory-optional

Type of course unit

 

Guided consultation

39 hod., optionally

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.