Course detail

MEMS and NEMS Systems

FSI-TSYAcad. year: 2024/2025

This course familiarizes students with the design and technology of MEMS and NEMS systems production. Through case studies, students will learn to design MEMS sensors and actuators that meet a set of specifications (sensitivity, frequency response, accuracy, linearity). Based on the knowledge of basic principles, students will also be able to design MEMS and NEMS systems, to create their production processes, and to make them themselves.

Language of instruction

Czech

Number of ECTS credits

3

Mode of study

Not applicable.

Guarantor

doc. Ing. Stanislav Průša, Ph.D.

Department

Institute of Physical Engineering (ÚFI)

Entry knowledge

kinematics, strength and elasticity, material sciences, surfaces and thin films

Rules for evaluation and completion of the course

Graded course-unit credit: participation in seminars, at the end of the semester will be evaluated assigned individual project.
Attendance at seminars is obligatory and is monitored by the teacher. The way of compensating missed lessons will be determined by the teacher based on the extent and content of missed lessons.

Aims

The aim of the course is to acquaint students with the principles and with the technological processes of production of MEMS and NEMS systems, such as lithography and surface micro/nano-machining methods. Students will get acquainted with real properties and design of individual types of MEMS and NEMS systems with optimal use of computers. They will also be able to use acquired skills and knowledge in the field of thin-film preparation, electron, and optical microscopy and design.
The course enables students to acquire of necessary knowledge about the design of advanced MEMS and NEMS systems due to their correct mechanical functionality. Students will be systematically acquainted with their functions, production technologies, and their applications so that they can design these mechanisms.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

GAD-EL-HAK, Mohamed. The MEMS handbook. CRC press, 2001.
GARDNER, Julian W.; VARADAN, Vijay K.; AWADELKARIM, Osama O. Microsensors, MEMS, and smart devices. New York: Wiley, 2001.
HSU, Tai-Ran. MEMS and microsystems: design, manufacture, and nanoscale engineering. John Wiley & Sons, 2008.
LEONDES, Cornelius T. (ed.). Mems/Nems: (1) Handbook techniques and applications design methods, (2) Fabrication techniques, (3) manufacturing methods, (4) Sensors and actuators, (5) Medical applications and MOEMS. Springer Science & Business Media, 2007.
SESHAN, Krishna. Handbook of Thin Film Deposition. William Andrew, 2001.

Recommended reading

GARDNER, Julian W.; VARADAN, Vijay K.; AWADELKARIM, Osama O. Microsensors, MEMS, and smart devices. New York: Wiley, 2001.
HSU, Tai-Ran. MEMS and microsystems: design, manufacture, and nanoscale engineering. John Wiley & Sons, 2008.

Classification of course in study plans

  • Programme N-PMO-P Master's 1 year of study, summer semester, compulsory

  • Programme C-AKR-P Lifelong learning

    specialization CLS , 1 year of study, summer semester, elective

Type of course unit

 

Lecture

13 hod., optionally

Teacher / Lecturer

doc. Ing. Stanislav Průša, Ph.D.

Syllabus

1. Introduction to MEMS and NEMS systems
2. Basic principles of micromechanics for MEMS and NEMS systems
3. Basic materials for the design of MEMS and NEMS systems
4. Basic micro and nanotechnology of production, choice of suitable production technology
5. Processes for mass micromachining of MEMS systems
6. Design of MEMS / NEMS actuator using capacitive, electrostatic, thermal principle
7. Design of MEMS / NEMS actuator using piezoresistive, piezoelectric, magnetic and optical principle
8. Design of MEMS / NEMS sensor using capacitive, electrostatic, thermal principle
9. Design of MEMS / NEMS sensor using piezoresistive, piezoelectric, magnetic and optical principle
10. MEMS systems in optoelectronics and biomedicine
11. Application of MEMS in the automotive and aerospace industry
12. Applications of MEMS in informatics and telecommunications

Computer-assisted exercise

13 hod., compulsory

Teacher / Lecturer

doc. Ing. Stanislav Průša, Ph.D.

Syllabus

Computer aided lectures - design of selected MEMS and NEMS mechanisms.