Course detail
MEMS and NEMS Systems
FSI-TSYAcad. year: 2024/2025
This course familiarizes students with the design and technology of MEMS and NEMS systems production. Through case studies, students will learn to design MEMS sensors and actuators that meet a set of specifications (sensitivity, frequency response, accuracy, linearity). Based on the knowledge of basic principles, students will also be able to design MEMS and NEMS systems, to create their production processes, and to make them themselves.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Entry knowledge
Rules for evaluation and completion of the course
Attendance at seminars is obligatory and is monitored by the teacher. The way of compensating missed lessons will be determined by the teacher based on the extent and content of missed lessons.
Aims
The course enables students to acquire of necessary knowledge about the design of advanced MEMS and NEMS systems due to their correct mechanical functionality. Students will be systematically acquainted with their functions, production technologies, and their applications so that they can design these mechanisms.
Study aids
Prerequisites and corequisites
Basic literature
GARDNER, Julian W.; VARADAN, Vijay K.; AWADELKARIM, Osama O. Microsensors, MEMS, and smart devices. New York: Wiley, 2001.
HSU, Tai-Ran. MEMS and microsystems: design, manufacture, and nanoscale engineering. John Wiley & Sons, 2008.
LEONDES, Cornelius T. (ed.). Mems/Nems: (1) Handbook techniques and applications design methods, (2) Fabrication techniques, (3) manufacturing methods, (4) Sensors and actuators, (5) Medical applications and MOEMS. Springer Science & Business Media, 2007.
SESHAN, Krishna. Handbook of Thin Film Deposition. William Andrew, 2001.
Recommended reading
HSU, Tai-Ran. MEMS and microsystems: design, manufacture, and nanoscale engineering. John Wiley & Sons, 2008.
Classification of course in study plans
Type of course unit
Lecture
Teacher / Lecturer
Syllabus
2. Basic principles of micromechanics for MEMS and NEMS systems
3. Basic materials for the design of MEMS and NEMS systems
4. Basic micro and nanotechnology of production, choice of suitable production technology
5. Processes for mass micromachining of MEMS systems
6. Design of MEMS / NEMS actuator using capacitive, electrostatic, thermal principle
7. Design of MEMS / NEMS actuator using piezoresistive, piezoelectric, magnetic and optical principle
8. Design of MEMS / NEMS sensor using capacitive, electrostatic, thermal principle
9. Design of MEMS / NEMS sensor using piezoresistive, piezoelectric, magnetic and optical principle
10. MEMS systems in optoelectronics and biomedicine
11. Application of MEMS in the automotive and aerospace industry
12. Applications of MEMS in informatics and telecommunications
Computer-assisted exercise
Teacher / Lecturer
Syllabus