Course detail
Microsensors and Microelectromechanical Systems
FEKT-BPC-MMSAcad. year: 2024/2025
Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.
Language of instruction
Number of ECTS credits
Mode of study
Guarantor
Department
Entry knowledge
Rules for evaluation and completion of the course
Aims
Fundamental knowledge of theory and earning practical skills how to design microelectromechanical systems, microsensors and to apply methods of non-electrical quantities measurement, methodology and evaluation.
Study aids
Prerequisites and corequisites
Basic literature
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)
Recommended reading
Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)
Elearning
Classification of course in study plans
Type of course unit
Lecture
Teacher / Lecturer
Syllabus
Fundaments of microelectronic technologies. Classification of microelectronic technologies, technologies of thin and thick films, fundaments of semiconductor technologies.
Introduction into semiconductors and their exploiting in sensorics.
Resistive sensors. General properties, model of electric schematic diagram, classification of resistive sensors, essential description of microsensors (gauges, thermistors, posistors, ...).
Capacitive microsensors. General parameters, model of electric schematic diagram, classification of capacitive sensors.
Hall sensors. Physical principle, materials for Hall sensors.
Piezoelectric sensors. Physical principle, materials for piezoelectric sensors, design and application.
CCD sensors. Physical principle, General parameters and application.
Light emission sensor generators.
Chemical sensors. Physical principle. General parameters and application. Classification of chemical sensors, description (conductometric, pH sensors, ...).
Special types of sensors.
Micromechanical systems. General parameters and application. Manufacturing of micromechanical systems.
New trends in microsensorics and micromechanical systems.
Laboratory exercise
Teacher / Lecturer
Syllabus
Introduction, administration and organisation, safety at work.
Practical fundamental of microelectronic technology, Laboratory project.
Measurement of position.
Measurement of temperature.
Measurement of pressure.
Measurement of vibrations and inclination.
Measurement of light intensity.
Measurement of conductivity and pH.
Measurement of chemicals in liquids.
Measurement of gases.
Special sensors.
Consultations by lab project.
Free topic.
Examen test.
Elearning