Course detail

Microsensors and Microelectromechanical Systems

FEKT-MPA-MMSAcad. year: 2024/2025

Introduction into microsensors, general clasification and parameters, and microelectromechanical systems (MEMS). Fundamentals of microelectronic technologies and MEMS technology. Fundamentals of phenomena in materials including semiconductors and their exploiting in sensors. Resistive, capacitive and inductance microsensors including MEMS-based solution (position, pressure, temperature, acceleration, ....). Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. Optical and CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). New trends in microsensors and MEMS.

Language of instruction

English

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaromír Hubálek, Ph.D.

Department

Department of Microelectronics (UMEL)

Entry knowledge

Students who enroll in the subject should be able to explain the physical principles of the curriculum of high school physics. He should know ohm's law, calculate capacitor capacitance, know the difference between own and improper semiconductor, P and N semiconductor, discuss the difference between bipolar and unipolar transistor, diode function and know the basic distribution of energy bands of electromagnetic waves. Generally, knowledge is required at the bachelor level.
Work in the laboratory is subject to the valid qualification of the "instructed worker" according to the Decree. 50/1978 Coll., Which students must acquire before commencement of teaching. Information on this qualification can be found in the Dean's Guidance on Safety Regulations.

Rules for evaluation and completion of the course

The conditions for the successful completion of the course are set by an updated regulation of the course guarantor. Information is given in the test rules on the subject's website.
The content and forms of instruction in the evaluated course are specified by a regulation issued by the lecturer responsible for the course and updated for every academic year.

Aims

Target of the course is to present theory, principles and design of microsensors and microelectromechanical systems (MEMS), to train how to design microsystems and their application.
The student is able to:
- explain the basic properties of sensors
- explain the difference between the sensor and the converter of quantity (sensing element)
- explain principles of microelectromechanical systems,
- describe the basic principles of non-electric quantities
- describe technologies for microsensor fabrication
- explain the difference between a physical, a chemical sensor and a biosensor

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

Hubálek, J., Prášek, J., Pekárková, J., Bendová, M., Drbohlavová, J., Majzlíková, P.: Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)

Recommended reading

Czichos Horst; Measurement, Testing and Sensor Technology: Fundamentals and Application to Materials and Technical Systems. Springer International Publishing AG, 2018, ISBN 9783319763842 (EN)
Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)

Classification of course in study plans

  • Programme MPA-MEL Master's 0 year of study, summer semester, elective
  • Programme MPAD-MEL Master's 0 year of study, summer semester, elective

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.

Syllabus

Introduction into microsensors and micromechanical systems. General parameters, classification, characteristics.
Fundaments of microelectronic technologies. Classification of microelectronic technologies, technologies of thin and thick films, fundaments of semiconductor technologies.
Introduction into semiconductors and their exploiting in sensorics.
Resistive sensors. General properties, model of electric schematic diagram, classification of resistive sensors, essential description of microsensors (gauges, thermistors, posistors, ...).
Capacitive microsensors. General parameters, model of electric schematic diagram, classification of capacitive sensors.
Hall sensors. Physical principle, materials for Hall sensors.
Piezoelectric sensors. Physical principle, materials for piezoelectric sensors, design and application.
CCD sensors. Physical principle, General parameters and application.
Light emission sensor generators.
Chemical sensors. Physical principle. General parameters and application. Classification of chemical sensors, description (conductometric, pH sensors, ...).
Special types of sensors.
Micromechanical systems. General parameters and application. Manufacturing of micromechanical systems.
New trends in microsensorics and micromechanical systems. 

Laboratory exercise

26 hod., compulsory

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.

Syllabus

Introduction, administration and organisation, safety at work.
Practical fundamental of microelectronic technology, Laboratory project.
Measurement of position.
Measurement of temperature.
Measurement of pressure.
Measurement of vibrations and inclination.
Measurement of light intensity.
Measurement of conductivity and pH.
Measurement of chemicals in liquids.
Measurement of gases.
Special sensors.
Consultations by lab project.
Free topic.
Examen test.