Course detail

Physics and chemics of plasma

FCH-DCO_FNDAcad. year: 2024/2025

Selected chapters from physics and chemistry of equilibrium and non-equilibrium plasmas, their diagnostics and advanced applications with respect to the student's disertation theses.

Language of instruction

Czech

Mode of study

Not applicable.

Entry knowledge

Physical chemistry - thermodynamics, kinetics.
Physics - mass point motion, electric field and current, magnetic field
Mathematics - differential equations

Rules for evaluation and completion of the course

Student will give a presentation about given diagnostic technique (techniquies) for about 30 minutes. After that broad discussion for about next 30 minutes will be given.
Students must participate at exams of their colleagues.

Aims

The lectures give an overview through the fundamental properties of plasma state and presents methodology of plasma chemistry so that students of chemical engineering can apply the unique physical characteristics of plasma to such fields as material sciences, microelectronics, biology, and polymer, organic, inorganic and analytical chemistries. In the lecture is represented a broad spectrum of applications that give special attention to those in which a nonequilibrium plasma (Te >> Tn) is used.
Student will obtain detail knowledge about properties of plasma state and contemporary methodology of plasma chemistry related to his/her disertation thesis. The broader overview will be checked during the final exam.

Study aids

Not applicable.

Prerequisites and corequisites

Not applicable.

Basic literature

ANDERS, A. Handbook of Plasma Ion Implantation and deposition, 1st ed., New York: John Wiley & Sons, 2000, ISBN 0-471-24698-0 (CS)
ROTH J.R. Industrial Plasma Engineering I. , II., London: CRC Press - Taylor & Francis Group, 1995, ISBN (Vol. 1): 978-0750303187, ISBN (Vol. 2): 978-0750303170 (CS)
SHUL, R.J., PEARTON, S.J. Handbook of Advanced Plasma Processing, 1st ed., Berlin: Springer, 2000, ISBN 978-3-642-56989-0 (CS)

Recommended reading

Not applicable.

Classification of course in study plans

  • Programme DPCP_FCH_4 Doctoral

    branch DPCPO_FCH_4 , 1 year of study, winter semester, compulsory-optional

  • Programme DPCP_FCH_N Doctoral 1 year of study, winter semester, compulsory-optional
  • Programme DKCP_FCH_N Doctoral 1 year of study, winter semester, compulsory-optional