Course detail

Microsensors and Microelectromechanical Systems

FEKT-BPC-MMSAcad. year: 2025/2026

Introduction into microsensors, general calsification and parameters, and microelectromechanical systems (MEMS). 

Fundamentals of microelectronic technologies and MEMS technology. 

Fundamentals of phenomenas in materials including semiconductors and their exploiting in sensors. 

Resistive, capacitive and inductance microsensors including MEMS solution (position, pressure, temperature, acceleration, ....). 

Magnetoelectric sensors and Hall's probes. Generating sensors based on thermoelectric, piezoelectric, and inductive principle. 

Optical and CCD sensors. Light emission sensor generators. 

Chemical and biochemical sensors (conductometric, pH sensors, lambda probe, enzymatic sensors, ...). 

New trends in microsensors and MEMS.

Language of instruction

Czech

Number of ECTS credits

5

Mode of study

Not applicable.

Guarantor

prof. Ing. Jaromír Hubálek, Ph.D.

Department

Department of Microelectronics (UMEL)

Entry knowledge

A student who enrolls in the course should be able to explain physics principles from the high school physics curriculum. They should know Ohm's law, calculate the capacitance of a capacitor, know the difference between a self and non-self semiconductor, P and N type semiconductor, discuss the difference between a bipolar and unipolar transistor, the function of a diode, and know the basic energy band distribution of electromagnetic waves. In general, knowledge at the undergraduate level is required.

Work in the laboratory is subject to a valid "instructed person" qualification, which students must obtain before starting the course. Information on this qualification is given in the Dean's Guideline on Student Familiarity with Safety Regulations. Translated with www.DeepL.com/Translator (free version)t před zahájením výuky. Informace k této kvalifikaci jsou uvedeny ve Směrnici děkana Seznámení studentů s bezpečnostními předpisy. 

Rules for evaluation and completion of the course

The student can score up to 20 points (minimum 14 points to pass to examination) from the laboratory exercises, 30 points in the written examination and 50 points in the oral examination.

The definition of supervised teaching and the way it is carried out are set out in the annually updated decree of the course guarantor. 

Aims

The aim of the course is to introduce the theory, principles and design of microsensors and microelectromechanical systems (MEMS). 

The main objective of the course is to provide knowledge for their design and optimal use.

The graduate of the course is able to:

- explain the basic properties of sensors,

- explain the difference between a sensor and a transducer,

- explain the principles of microelectromechanical systems,

- describe the basic principles of non-electrical transducers,

- understand the technology for creating microsensors,

- explain the difference between a physical sensor, a chemical sensor and a biosensor.

 of theory and earning practical skills how to design microelectromechanical systems, microsensors and to apply methods of non-electrical quantities measurement, methodology and evaluation.

Study aids

Scriptum, presentations, handouts for exercises, video tutorials. All available in elearning. 

Prerequisites and corequisites

Not applicable.

Basic literature

HUBÁLEK, J.; DRBOHLAVOVÁ, J.; PRÁŠEK, J.; BUŠINOVÁ, P.; BENDOVÁ, M. Mikrosenzory a mikroelektromechanické systémy. Brno: 2012. (CS)
HUBÁLEK, J.; PRÁŠEK, J.; PEKÁRKOVÁ, J; BENDOVÁ, M.; DRBOHLAVOVÁ, J.; MAJZLÍKOVÁ, P. Microsensors and Microelectromechanical Systems. Brno: 2015. (EN)

Recommended reading

Czichos Horst; Measurement, Testing and Sensor Technology: Fundamentals and Application to Materials and Technical Systems. Springer International Publishing AG, 2018, ISBN 9783319763842 (EN)
Julian W. Gardner; Microsensors : Principles and Applications. John Wiley & Sons Inc., 2020, ISBN 0470850434 (EN)

Classification of course in study plans

  • Programme BPC-NCP Bachelor's 3 year of study, summer semester, compulsory-optional
  • Programme BPC-ECT Bachelor's 3 year of study, summer semester, compulsory-optional
  • Programme BPC-MET Bachelor's 3 year of study, summer semester, compulsory-optional
  • Programme BPC-SEE Bachelor's 0 year of study, summer semester, elective

Type of course unit

 

Lecture

26 hod., optionally

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.

Syllabus

Introduction into microsensors and micromechanical systems. General parameters, classification, characteristics.
Fundaments of microelectronic technologies. Classification of microelectronic technologies, technologies of thin and thick films, fundaments of semiconductor technologies.
Introduction into semiconductors and their exploiting in sensorics.
Resistive sensors. General properties, model of electric schematic diagram, classification of resistive sensors, essential description of microsensors (gauges, thermistors, posistors, ...).
Capacitive microsensors. General parameters, model of electric schematic diagram, classification of capacitive sensors.
Hall sensors. Physical principle, materials for Hall sensors.
Piezoelectric sensors. Physical principle, materials for piezoelectric sensors, design and application.
CCD sensors. Physical principle, General parameters and application.
Light emission sensor generators.
Chemical sensors. Physical principle. General parameters and application. Classification of chemical sensors, description (conductometric, pH sensors, ...).
Special types of sensors.
Micromechanical systems. General parameters and application. Manufacturing of micromechanical systems.
New trends in microsensorics and micromechanical systems.

Laboratory exercise

26 hod., compulsory

Teacher / Lecturer

prof. Ing. Jaromír Hubálek, Ph.D.

Syllabus

Introduction, administration and organisation, safety at work.
Practical fundamental of microelectronic technology, Laboratory project.
Measurement of position.
Measurement of temperature.
Measurement of pressure.
Measurement of vibrations and inclination.
Measurement of light intensity.
Measurement of conductivity and pH.
Measurement of chemicals in liquids.
Measurement of gases.
Special sensors.
Consultations by lab project.
Free topic.
Examen test.