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FEKT-CMMSAcad. year: 2010/2011
Fundamentals of microelectronic technology for microsensors and microsystems. Introduction into microsensors and micromechanical systems. General parameters, classification, characteristics. Fundaments of microelectronic technologies. Introduction into semiconductors and their exploiting in sensorics.Resistive microsensors (gauges, thermistors, posistors, ...). Capacitive microsensors.Hall sensors. Piezoelectric sensors. CCD sensors. Light emission sensor generators. Chemical and biochemical sensors (conductometric, pH sensors, ...). Special types of sensors. Micromechanical systems, manufacturing of micromechanical systems. New trends in microsensorics and micromechanical systems.
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Specification of controlled education, way of implementation and compensation for absences
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branch BC-MET , 3 year of study, summer semester, elective specialised
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